B81B   1/00  \	0	0	3C081	B81B   1/00	2771	ưΡޤϲǤʤ֡㡥ޥӺٴ֡Σ	Devices without movable or flexible elements, e.g. micro-capillary devices [7]
B81B   3/00  \	0	0	3C081	B81B   3/00	8710	Ρޤѷǽǡ㡥ΤҤޤ졤ʤ֡Σ	Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (B81B 5/00 takes precedence) [7]
B81B   5/00  \	0	0	3C081	B81B   5/00	531	ߤ˰ưǽǡ㡥饤ɲǽʡޤϲžǽǡʤ֡Σ	Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements [7]
B81B   7/00  \	0	0	3C081	B81B   7/00	146	ޥ¤ƥΣ	Micro-structural systems [7]
B81B   7/02  \	1	1	3C081	B81B   7/02	1322	εǽäŬΤŵŪޤϸŪ֤ޤΡ㡥ޥŵ֡Σͣţͣӡϡʣ££ͥˡΣ	containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] (B81B 7/04 takes precedence) [2006.01]
B81B   7/04  \	1	1	3C081	B81B   7/04	287	ƱΥޥ¤֤ΥͥåȥޤΣ	Networks or arrays of similar micro-structural devices [7]
