H01L21/00	ȾƳ֤ޤϸ֤ޤϤʤ¤ޤϽŬѤˡޤ֡ʡ¤ޤϽλޤ¬ꡤޤϿ¬ȣ̣ѲϩΤŰ̾ɤޤɽ̾ɤΤʤüҼưʤ¿ʳȣ̣ѥ롼ףȣ̣ȣ̣ʬव֤ޤϤʤ¤ޤϽͭˡޤ֤ϤΥ롼פ򻲾ȡ¾Υ֥饹ޤñ칩ʤˡϡϢ륵֥饹㡥ãáã¡򻲾ȡեȥᥫ˥ˡˤ̲ϥѥ󲽤줿ɽ̤¤ΤκޤϸơΤäŬ礷ְ̣ǣơ
H01L21/02	ȾƳ֤ޤϤʤ¤ޤϽ
H01L21/02002	ХϤ¤<br><br><u></u><br><br>Υ롼פϤʤ֤κ˹Ԥ륦Ϥ¤ޤ롤ʤ󥴥åȤǡʣ£ĤޤˤȴĤʣȣ̣ޤˤδ֤Ǥ<br>Υ롼פϼΤΤޤʤ<br>ݸפޤϸൡñʤѣ£<br>Ǯʿ경ȣ̣
H01L21/02005	ƱʥХ륯Ϥ¤
H01L21/02008	¿ʳ
H01L21/0201	ι
H01L21/02013	иᡤåԥ󥰲ù
H01L21/02016	΢̽
H01L21/02019	вإå󥰡
H01L21/02021	Хå̼
H01L21/02024	ж̸
H01L21/02027	з뾽
H01L21/0203	ɽ̤ؤ¿ΰη
H01L21/02032	кޤϺƲùˤΡ
H01L21/02035	Х
H01L21/02041	
H01L21/02043	¤ʤ饤ư
H01L21/02046	Хɥ饤Τߡʣȣ̣ͥˡ
H01L21/02049	ХΥեûʣȣơˤˤΡ
H01L21/02052	ХåΤߡʣȣ̣ͥˡ
H01L21/02054	Хɥ饤ȥåȤʳȹ礻ˤΡʣȣ̣ͥˡ
H01L21/02057	¤
H01L21/0206	ؤδϢκ桤ޤϸΤΡ
H01L21/02063	йӥޤϥ󥿥ȥۡηǤΡ
H01L21/02065	йؤʿóǤΡ
H01L21/02068	Ƴء㡥ݥꥷꥳޤϥեꥳءδϢκ桤ޤϸΤΡ
H01L21/02071	йƳؤ̡㡥ңɣšǤΡ
H01L21/02074	йƳؤʿóǤΡ
H01L21/02076	дĤҲ줿
H01L21/02079	кΤ
H01L21/02082	ʡ
H01L21/02085	Хɤ
H01L21/02087	Хϥå
H01L21/0209	Х΢̤
H01L21/02093	¿
H01L21/02096	еŪΤߡ
H01L21/02098	Х졼ϢΤߡ㡥졼֥졼
H01L21/02101	Ķ׳ΤϢΤߡ
H01L21/02104	ؤηʾ̣ãá뾽Ḷ́ã¡ˡ<br><br><u>ٹ</u><br><br>롼ףȣ̣ݣȣ̣ϥ롼ףȣ̣ȣ̣ӣȣ̣ʸκʬब̤Ǥ롥<br>롼ףȣ̣ݣȣ̣ȣ̣ȣ̣ӣȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L21/02107	дľؤη<br><br><u>ٹ</u><br><br>롼ףȣ̣ݣȣ̣ϥ롼ףȣ̣ȣ̣ȣ̣ӣȣ̣ʸκʬब̤Ǥ롥<br>롼ףȣ̣ݣȣ̣ȣ̣ȣ̣ȣ̣ӣȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L21/02109	ؤμħΤΡ㡥¿¿ΡΤޤΤμ
H01L21/02112	ؤκħΤΡ<br><br><u></u><br><br>֥쥤䡼鹽ءʤޥ쥤䡼Ϥˣȣ̣ˤʬह롨¿ؤϤˣȣ̣ˤʬह
H01L21/02115	úǤʤ㡥ݣáɤޤϿǤɡפ줿úǡ
H01L21/02118	úǷϹʬͭޤ̵㡥ݥꥤߥɡݥꥷ֥ƥޤϣУ֣áʥݥޡ켫Σãǡեȥ쥸Ȥ켫Σǣơˡ
H01L21/0212	кե륪ܥ󲽹ʪ㡥ʣãƣˣʣãȣƣˣޤϻͥեò
H01L21/02123	кꥳޤ
H01L21/02126	кӣ顤ϡӣȡΡáơޤ¾°ǤΤʤȤ⣱Ĥޤ㡥ӣϣáӣϣáȤޤϣӣϣΣá
H01L21/02129	кۤǤޤդɡפ줿ꥳ㡥£Уӣǡ£ӣǤޤϣУӣǡ<br><br><u></u><br><br>ϥ㡥եǡޤ£УӣǡУӣǡ£ӣǤʪϤˣȣ̣ˤʬह
H01L21/02131	кϥɡפ줿ꥳ㡥ƣӣǡ
H01L21/02134	кǥ륻󤫤ʤ롤㡥ȣӣѡ
H01L21/02137	к륭륷륻󤫤ʤ롤㡥ͣӣѡ
H01L21/0214	кꥳⲽʪ㡥ӣϣΤޤϣӣϣΡȡ
H01L21/02142	кꥳ󤪤ӾʤȤ⣱Ĥζ°Ǥޤࡤ㡥°ꥱȤȤΤޤ϶°ꥳⲽʪ
H01L21/02145	кߥ˥ޤࡤ㡥ӣϣ
H01L21/02148	кϥե˥ޤࡤ㡥ȣӣϣޤϣȣӣϣΡ
H01L21/0215	к󥿥ޤࡤ㡥ԣӣϣ
H01L21/02153	кޤࡤ㡥ԣӣϣ
H01L21/02156	кʤȤ⣱ĤδีǤޤࡤ㡥󥿥˥ɡ󥸥ޤϥåȥꥦΥꥱȡ
H01L21/02159	к륳˥ޤࡤ㡥ڣӣϣ
H01L21/02161	кʾζ°Ǥޤ
H01L21/02164	кꥳ㡥ӣϣ<br><br><u></u><br><br>ꥳؤηϡΤޤϷ˴ؤ餺Υ롼פʬव롨ɡԥ󥰡¾Υ롼פޤϺιʪƤϣȣ̣ȥ֥롼פ򻲾ȡꥳͭΤѤ뤳ȰʳιˤĤƵҤʤȤϤΥ롼פӣȣ̣ȥ֥롼פʬह
H01L21/02167	кǤޤޤʤúꥳ㡥ӣáӣáȤޤúⲽꥳʣȣ̣ӣȣ̣ͥˡ
H01L21/0217	кǤޤޤʤⲽꥳ㡥ӣΣޤϣӣ£Σʣȣ̣ӣȣ̣ͥˡ
H01L21/02172	кʤȤ⣱Ĥζ°Ǥޤࡤ㡥°ʪ°ⲽʪ°ⲽʪޤ϶°úʪʥꥳޤȣ̣°ꥱȣȣ̣ˡ
H01L21/02175	ж°ħΤΡʣȣ̣ͥˡ
H01L21/02178	кߥ˥ޤࡤ㡥죲ϣ
H01L21/02181	кϥե˥ޤࡤ㡥ȣϣ
H01L21/02183	к󥿥ޤࡤ㡥ԣᣲϣ
H01L21/02186	кޤࡤ㡥ԣϣ
H01L21/02189	к륳˥ޤࡤ㡥ڣϣ
H01L21/02192	кʤȤ⣱ĤδีǤޤࡤ㡥󥿥˥ɡ󥸥ޤϥåȥꥦλʪ
H01L21/02194	кʾζ°Ǥޤ
H01L21/02197	кڥ֥ȹ¤ġ㡥£ԣϣ
H01L21/022	ؤΡʤʣΥ֥쥤䡼ʤ롤㡥ݣ°ʪߤѤ߽ŤͤΡؤޤϴ˾أȣ̣ȣ̣ˡ
H01L21/02203	¿ء
H01L21/02205	κħΤء
H01L21/02208	Τˣӣ餫鹽벽ʪޤ
H01L21/02211	вʪ㡥󡤥륷ޤϥ
H01L21/02214	ХꥳȻǤ鹽벽ʪ<br><br><u></u><br><br>Υ롼פϥȻǤκʪޤʤ
H01L21/02216	оʤȤ⣱ĤΥꥳ󡽻ǷޤʬҤǤ벽ʪǤäơꥳޤϻǤ˷礷ǤޤͭĲʪ㡥
H01L21/02219	Хꥳ󤪤Ǥʤ벽ʪ<br><br><u></u><br><br>Υ롼פϥǤκʪޤʤ
H01L21/02222	вʪ饶
H01L21/02225	ؤηħΤΡ
H01L21/02227	Ѱʳιˤ<br><br><u></u><br><br>ȣ̣ȣ̣ϰϤʬवϡȿμˤꤵˣȣ̣ȣ̣ӣȣ̣ˤʬव
H01L21/0223	лˤ㡥Ĥλ
H01L21/02233	ȾƳδĤޤȾƳؤΡ
H01L21/02236	Уɣ²ȾƳΡ
H01L21/02238	¾θǤȷ礷Ƥʤꥳ󡤤ʤ㥷ꥳ
H01L21/02241	Уɣɣɡ²ȾƳΡ
H01L21/02244	ж°ؤΡ
H01L21/02247	ⲽˤ㡥Ĥⲽ
H01L21/02249	лⲽƱˤ
H01L21/02252	Хץ饺޽ˤ㡥ĤΥץ饺޻ʥץ饺ޤˤؤθȣ̣ӥ֥롼סˡ
H01L21/02255	Ǯˤʣȣ̣ͥ表ؤθȣ̣ӥ֥롼סˡ
H01L21/02258	۶˽ˤ㡥۶˻
H01L21/0226	ѹˤʤ켫Σãáˡ
H01L21/02263	еޤϾ꤫ѡ<br><br><u></u><br><br>Υ롼פӥ֥롼פϵΤޤϾʪŪʡ㡥åȤȯޤϸβǮˤäˡޤ
H01L21/02266	ХåȤʪŪȯˤѡ㡥ѥå󥰡ȿѥå󥰡ʪŪѤޤϥѥ륹졼ѡ
H01L21/02269	Ǯˤѡȣ̣ͥ<br><br><u></u><br><br>ʬԥĹˡ˴ϢϤΥ롼פʬव
H01L21/02271	ХޤϾβʪʬޤȿˤѡʤŪѡʣȣ̣ͥˡ
H01L21/02274	Хץ饺ޤλѡΣУţã֣ġϡ
H01L21/02277	ȿץ饺ޤޤǮʳμʤǳΡ㡥ã֣ġ
H01L21/0228	Хåã֣Ĥˤѡ㡥̣ġ̣šѥ륹ã֣ġ<br><br><u></u><br><br>åã֣Ĥ˴ϢϤˣȣ̣ˤʬह
H01L21/02282	бĹ㡥žۡݥˡץ졼
H01L21/02285	Х󥰥ߥ奢ݥ֥åˡ
H01L21/02288	а㡥󥯥åȰʤ켫Σ£ʡˡ
H01L21/0229	бθѡ
H01L21/02293	ѹˤ륨ԥؤηʥԥĹ켫Σã¡ˡ<br><br><u></u><br><br>ͣ£ṣ̌ˤ󥨥ԥؤηϤΥ롼פޤʤͣ£ŤˤĤƣȣ̣ȡ̣ŤˤĤƣȣ̣
H01L21/02296	طޤϸǼ»ܤħΤΡʣȣ̣ӥ֥롼פͥˡ<br><br><u></u><br><br>Υ롼פӥ֥롼פؤηľܥ󥯤ޤΤߤǤ롨Ūʥˡ롤ʤüʷϵץ饺ޤδͿǮͶƳȿѲʷ뾽¤ˤʤɤÿʤǮϤʬवʤϣȣ̣ӥ֥롼פ򻲾ȡå󥰹ϣȣ̣ӥ֥롼׻ȡʿóϣȣ̣ӥ֥롼׻ȡå»νϣȣ̣ӥ֥롼׻
H01L21/02299	<br><br><u></u><br><br>Υ롼פӥ֥롼פ̩ɽ̽üѲΤνޤ롨å󥰤ϣȣ̣ȥ֥롼פӣȣ̣ȥ֥롼פ򻲾
H01L21/02301	Уݣ<br><br><u></u><br><br>Ƴ֤̤˴Ϣϣȣ̣ӥ֥롼פޤ
H01L21/02304	ؤη㡥˾ء̩ʻޤϳȻء
H01L21/02307	бΤˤ餹
H01L21/0231	żȤˤ餹㡥糰
H01L21/02312	еΤޤϾˤ餹
H01L21/02315	Хץ饺ޤˤ餹
H01L21/02318	и<br><br><u></u><br><br>Υ롼פؤηΰʤΤߤޤ롨ؤǹԤϣȣ̣ӥ֥롼פޤ
H01L21/02321	д¸ߤؤؤʪƳȣȥ֥롼פͥ<br><br><u></u><br><br>ȻˤꥳؤդƳޤϴ¸ߤؤΥɡԥ󥰤ϤΥ롼פӥ֥롼פޤ롨Ƴˡϣȣ̣ȣ̣ȣ̣ӥ֥롼פ򻲾
H01L21/02323	лǤƳ
H01L21/02326	ⲽʪؤˡ㡥ӣΤӣϣΤؤѴ
H01L21/02329	ǤƳ
H01L21/02332	лʪؤˡ㡥ӣϤӣϣΤؤѴ
H01L21/02334	طΣݣ㡥֤ν<br><br><u></u><br><br>Ƴ֤̤˴Ϣϣȣ̣ӥ֥롼פޤ
H01L21/02337	еΤޤϾˤ餹
H01L21/0234	Хץ饺ޤˤ餹
H01L21/02343	бΤˤ餹
H01L21/02345	ռˤ餹㡥Ļ
H01L21/02348	л糰ˤ餹
H01L21/02351	γռͤˤ餹㡥ŻҡեγҡۻҤޤϥˤ餹
H01L21/02354	Хҡռѡ㡥졼
H01L21/02356	ؤη֤Ѳ㡥եؤ뾽ؤˤ
H01L21/02359	ؤɽ̴Ѳ
H01L21/02362	ؤη㡥åԥؤޤϳȻɡ
H01L21/02365	дľؤ̵Ƴκηʸ֤ΤΤΣȣ̣ˡ<br><br><u>ٹ</u><br><br>롼ףȣ̣ϥ롼ףȣ̣ȣ̣ӣȣ̣ʸκʬब̤Ǥ롥<br>롼ףȣ̣ȣ̣ӣȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L21/02367	дġ
H01L21/0237	к
H01L21/02373	У²ȾƳκ
H01L21/02376	úǡ㡥ɥ饤ܥ
H01L21/02378	úꥳ
H01L21/02381	Хꥳ󡤥ꥳ󥲥ޥ˥ࡤޥ˥
H01L21/02384	мޤ
H01L21/02387	Уɣɣɡ²
H01L21/02389	ⲽʪ
H01L21/02392	ղʪ
H01L21/02395	ФҲʪ
H01L21/02398	Хʪ
H01L21/024	Уɣɡ֣²
H01L21/02403	лʪ
H01L21/02406	βʪ
H01L21/02409	Хʪ
H01L21/02411	Хƥ벽ʪ
H01L21/02414	Уɣɡ֣²°ʤʪȾƳκ㡥ʪ
H01L21/02417	лʪǤʤ륳ʥȾƳκ㡥ʪ
H01L21/0242	з뾽
H01L21/02422	뾽㡥饹ݥޡ
H01L21/02425	Ƴź㡥°ꥵɡ
H01L21/02428	й¤
H01L21/0243	ɽ̹¤
H01L21/02433	з뾽۸
H01L21/02436	дĤؤδ֤ء
H01L21/02439	к
H01L21/02441	Уɣ²ȾƳκ
H01L21/02444	úǡ㡥ɥ饤ܥ
H01L21/02447	úꥳ
H01L21/0245	Хꥳ󡤥ꥳ󥲥ޥ˥ࡤޥ˥
H01L21/02452	мޤ
H01L21/02455	Уɣɣɡ²
H01L21/02458	ⲽʪ
H01L21/02461	ղʪ
H01L21/02463	ФҲʪ
H01L21/02466	Хʪ
H01L21/02469	Уɣɡ֣²
H01L21/02472	лʪ
H01L21/02474	βʪ
H01L21/02477	Хʪ
H01L21/0248	Хƥ벽ʪ
H01L21/02483	Уɣɡ֣²°ʤʪȾƳκ㡥ʪ
H01L21/02485	лʪǤʤ¾Υ륳ʥȾƳκ㡥ʪ
H01L21/02488	
H01L21/02491	Ƴź
H01L21/02494	й¤
H01L21/02496	ع¤
H01L21/02499	ñء
H01L21/02502	Уؤʤ
H01L21/02505	Уʾؤʤ
H01L21/02507	иء㡥Ķʻҡ
H01L21/0251	Х졼ǥåء
H01L21/02513	Хߥ¤
H01L21/02516	з뾽۸
H01L21/02518	ء
H01L21/02521	к
H01L21/02524	Уɣ²ȾƳκ
H01L21/02527	úǡ㡥ɥ饤ܥ
H01L21/02529	úꥳ
H01L21/02532	Хꥳ󡤥ꥳ󥲥ޥ˥ࡤޥ˥
H01L21/02535	мޤ
H01L21/02538	Уɣɣɡ²
H01L21/0254	ⲽʪ
H01L21/02543	ղʪ
H01L21/02546	ФҲʪ
H01L21/02549	Хʪ
H01L21/02551	Уɣɡ֣²
H01L21/02554	лʪ
H01L21/02557	βʪ
H01L21/0256	Хʪ
H01L21/02562	Хƥ벽ʪ
H01L21/02565	Уɣɡ֣²°ʤʪȾƳκ㡥ʪ
H01L21/02568	лʪǤʤ륳ʥȾƳκ㡥ʪ
H01L21/0257	˥ɡԥ󥰡
H01L21/02573	Ƴŷ
H01L21/02576	Уη
H01L21/02579	Уз
H01L21/02581	ܶ°ޤϴีǡ
H01L21/02584	Хǥ륿ɡԥ󥰡
H01L21/02587	й¤
H01L21/0259	Хߥ¤
H01L21/02592	Хե
H01L21/02595	¿뾽
H01L21/02598	ñ뾽
H01L21/02601	Хʥγҡ
H01L21/02603	ХʥΥ磻䡼
H01L21/02606	ХʥΥ塼֡ʥܥʥΥ塼֣ȣ̣ˡ
H01L21/02609	з뾽۸
H01L21/02612	зˡ
H01L21/02614	ж°Ѵ㡥ⲽ
H01L21/02617	Ѽˡ
H01L21/0262	ХʪδԸޤʬ㡥ã֣ġ
H01L21/02623	бĹ
H01L21/02625	ͻλѡ
H01L21/02628	ϱդλѡ
H01L21/02631	и֤ǤʪŪѡ㡥ͣ£šѥå󥰡
H01L21/02634	Хۥ⥨ԥ
H01L21/02636	Ĺ㡥ñ뾽ñ뾽ȾƳκƱĹ
H01L21/02639	ĹΤδĤ¤
H01L21/02642	УӣϣޤϣӣΰʳΥޥ
H01L21/02645	м
H01L21/02647	Хƥ륪С
H01L21/0265	Хڥǥԥ
H01L21/02653	еݱݸʣ֣ݣ̣ݣӣ䡧֣̣ӡĹ
H01L21/02656	̽
H01L21/02658	̣ȣ̣ˡ
H01L21/02661	Уݣ
H01L21/02664	иʿọ́ȣ̣ˡ
H01L21/02667	ñ뾽ȾƳκη뾽ޤϺƷ뾽㡥Ĺ
H01L21/02669	з뾽Ǥλѡ
H01L21/02672	з뾽¥ʸǤλѡ
H01L21/02675	Х졼λѡ
H01L21/02678	Хӡ㡥ޥλѡ
H01L21/0268	Хޥη
H01L21/02683	Ϣ³ȯ졼
H01L21/02686	Хѥ륹졼
H01L21/02689	γҥӡλѡ
H01L21/02691	Хӡ
H01L21/02694	дĤȥԥؤδ֤γ桤㡥³ˡ󥰡
H01L21/02697	дľؤƳźη
H01L21/027	θΥեȥ꥽եåΤȾƳΤ˥ޥΤǡ롼ףȣ̣ޤϣȣ̣ʬवʤΡСʥեȥޥӸƤ켫ΣǣƣեȥޥޤϸƤΰֹ碌ޤϰַǣƣեȥեåǣ¡ǣģˡ
H01L21/0271	ͭʪؤʤΡ
H01L21/0272	Хեȥչѡ
H01L21/0273	Хեȥ쥸ؤνħΤΡ
H01L21/0274	Хեȥ꥽չ
H01L21/0275	Х졼ѤΡ
H01L21/0276	ȿɻѤΡʥ꥽Ѥȿɻ̣ǣƣˡ
H01L21/0277	Х쥯ȥ꥽չ
H01L21/0278	Хȥ꥽դޤϣ꥽չ
H01L21/0279	Х꥽չ
H01L21/033	̵ʪؤʤ
H01L21/0331	Хեȥչѡ
H01L21/0332	Фι㡥¿إޥħΤΡ
H01L21/0334	ФοʿޤϿľʿǤ礭۸֡ưħΤΡ
H01L21/0335	йΤưħΤΡ㡥ޥϽХޥ
H01L21/0337	Хޥ㡥եȥեޥ¦ɡηޤϥޥν㡥˴ط빩ħΤΡ
H01L21/0338	ХޥβٸäŬѤ빩
H01L21/04	ʤȤĤŰ̾ɤޤɽ̾ɡ㡥Уܹ硤˳ءꥢءͭ֡С֤¤äŬѤ¿ʳȣ̣ȣ̣ȾƳΤκȣ̣ˡ
H01L21/0405	ȾƳܥ㡥ɡɥ饤ܥ󤫤ʤȾƳΤ֤ͭ֡¤ˤ¿ʳȣ̣ˡ<br><br><u></u><br><br>Υ롼פϥѥå١ޤ
H01L21/041	Уݥɡפޤϣݥɡפ줿ΰΡ
H01L21/0415	ХѤΡ
H01L21/042	ȾƳΤηѤΡ㡥ꥻΡȾƳΤΥå󥰣ȣ̣ˡ
H01L21/0425	ŶˤΡ
H01L21/043	ХߥåŶˡ
H01L21/0435	ХåȥŶˡ
H01L21/044	ƳΡΡȾƳŶˡ
H01L21/0445	з뾽úꥳ󤫤ʤȾƳΤ֤ͭ֡¤ˤ¿ʳȣ̣ˡ
H01L21/045	úꥳɽ̤ѥå١󤹤Ρ
H01L21/0455	Уݥɡפޤϣݥɡפ줿ΰޤؤΡ㡥ȻѤΡ
H01L21/046	ХѤΡ<br><br><u></u><br><br>ۤǤˤ륤ӤθΥˡ󥰤ˤݥɡפ줿ΰʤ¾ʬव롤㡥ȣ̣
H01L21/0465	ХޥѤΡ
H01L21/047	Хӡȷ뾽ʿ̤ޤϼ뾽̴֤γ٤ħΤΡ
H01L21/0475	ȾƳΤηѤΡ㡥ꥻΡȾƳΤΥå󥰣ȣ̣ˡ
H01L21/048	ŶˤΡ
H01L21/0485	ХߥåŶˡ
H01L21/049	ƳΡΡȾƳŶˡ㡥ͣɣӥ󥿥ȡ
H01L21/0495	ХåȥŶˡ
H01L21/18	Խʪ㡥ɡԥ󥰺ޤޤϴޤޤʤɽɣ²θǤޤϣɣɣɡݣ­ʪȾƳΤͭ֡Сʣȣ̣ȣ̣ȣ̣ȣ̣ͥˡ<br><br><u></u><br><br>Υ롼פˤϡȤȤŪꤵƤʤƤ⡤ŬڤʵѤȤȤˤꡤΤɽɣ²θǡޤϣɣɣɡݣ­ʪǤǤƤ֤¤ޤϽŬƤ뤳Ȥ餫ˡޤ֤ޤޤ롥
H01L21/182	Уɣɣɡݣ֥إƥ¤ߺޤ߳Ȼޤ̵㡥ɣɣ̣ġ
H01L21/185	ܹΤȾƳΤܹ
H01L21/187	ľܹˤΡ
H01L21/20	ľؤȾƳκϽС㡥ԥĹиꥨԥ<br><br><u>ٹ</u><br><br>롼ףȣ̣ϥ롼ףȣ̣ݣȣ̣ؤκʬ˱ƶ롥<br>롼ףȣ̣ӣȣ̣ݣȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L21/2003	дĤħΤΡʣȣ̣ȣ̣ȣ̣ͥˡ
H01L21/2007	ؤѤȾƳδĤޤĤؤȾƳΥϤΥܥǥ󥰡ʣȣ̣ͥ表ܹΤȾƳΥϤФȾƳΥϤȣ̣ˡ
H01L21/2011	дĤ뾽㡥եʤΡ
H01L21/2015	дĤ뾽ȾƳκ㡥ʻŬ硤إƥԥ롤ʤΡ
H01L21/22	ȾƳΤؤΤޤȾƳΤΤޤȾƳΰ֤Խʪ㡥ɡԥ󥰺Ŷ˺γȻУޤϤʾԽʪ֤ߺѡԽʪκʬۡ
H01L21/2205	ХԥδĤ顤㡥ȥɡԥ󥰡ȥɡԥ󥰤ɻߤΤޤѤΡ
H01L21/221	Х顼˴ؤΡ
H01L21/2215	Уɣɣɡݣ­ʪˤΡ
H01L21/222	Хࡼɥեȡ
H01L21/2225	гȻ
H01L21/223	꤫ΤؤΤޤϸΤ鵤ؤγȻѤΡСʣȣ̣ȣ̣ޤǤͥ表ŬѤؤФƤγȻȣ̣ˡ
H01L21/2233	Уɣɣɡݣ­ʪؤΤޤϣɣɣɡݣ­ʪγȻ
H01L21/2236	Хץ饺꤫顤ޤϥץ饺ء
H01L21/225	ꡤ㡥ɡפ줿ʪءΤؤΤޤϸΤؤγȻѤΡСʣȣ̣ȣ̣ޤǤͥˡ
H01L21/2251	мɽɣ²ȾƳΤؤΤޤϼɽɣ²ȾƳΤγȻ
H01L21/2252	ȾƳɽ̤ء㡥꤫顤ԽʪΥץǥݥѤΡ
H01L21/2253	Хˤ<br><br><u></u><br><br>ȣ̣ȣ̣ˤơŬѤؤμȻľȹͤɬפ
H01L21/2254	ŬѤء㡥եȥ쥸ȡⲽʪޤŬѤؤ̲ᤷƤޤŬѤؤء
H01L21/2255	лʪ㡥УϣУӣǡȣ£ϣɡפ줿ʪΤߤʤŬѤء
H01L21/2256	ŬѤؤФơ
H01L21/2257	ŬѤؤꥳޤϥꥵɤޤϣӣɣУϣӡ㡥ݥꥷꥳ¿ꥳ󡤤ǤΡ
H01L21/2258	Уɣɣɡݣ­ʪؤΤޤϣɣɣɡݣ­ʪγȻ
H01L21/228	꤫ΤؤΤޤϸΤؤγȻѤΡ㡥ȻˡСʣȣ̣ȣ̣ͥˡ
H01L21/24	ȾƳΤԽʪ㡥ɡԥ󥰺Ŷ˺ιСʣȣ̣ͥˡ
H01L21/242	Хɡԥ󥰺ȣɣɣɡݣ­ʪȤι
H01L21/244	Ŷ˺ι
H01L21/246	Уɣɣɡݣ­ʪĤΡ
H01L21/248	ä˹ŬѤ֡
H01L21/26	ռξȼ͡Сʣȣ̣ͥˡ
H01L21/2605	мռ㡥ե١ޤϥ͡ѤΡ
H01L21/261	ǤѴȿ
H01L21/263	⥨ͥ륮ռͭΡʣȣ̣ͥ
H01L21/2633	Хå󥰡㡥ѥåå󥰡ΤΤΡ
H01L21/2636	вǮ㡥ŻҥӡǮΤΤΡ
H01L21/265	ˡʶɽŪʽΤΥӡɣȣʣ<br><br><u>ٹ</u><br><br>롼ףȣ̣ȣ̣ӣȣ̣ϥ롼ףȣ̣ӣȣ̣ʸκʬब̤Ǥ롥<br>롼ףȣ̣ȣ̣ȣ̣ȣ̣ӣȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L21/26506	Уɣ²ȾƳΤˤΡ
H01L21/26513	ŵŪ˳ʼ˴ؤΡ
H01L21/2652	Х롼ץơ
H01L21/26526	Хꥳ
H01L21/26533	ؤ뤿᥷ꥳŵŪԳʼ˴ؤΡ
H01L21/2654	Уɣɣɡݣ­ʪˤΡ
H01L21/26546	ŵŪ˳ʼ˴ؤΡ
H01L21/26553	Х롼ץơ
H01L21/2656	ХɡоݤƱȾƳΰǤŵŪ˳ԳʼξħΤΡ
H01L21/26566	Х饹Ρ㡥饹ӡλѡ
H01L2021/26573	ХɤˤΡ
H01L21/2658	ʬҥΡ㡥ǥܥ
H01L21/26586	Хӡȡ뾽̤⤷ϼ뾽ɽ̤Ȥδ֤γ٤ħΤΡ
H01L21/26593	м㤤٤ˤ
H01L21/266	ޥѤΡСʣȣ̣ͥˡ
H01L21/268	żȡ㡥졼Ѥ
H01L21/2683	У졼ѤΡ
H01L21/2686	󥳥ҡȤռѤΡ
H01L21/28	ȣ̣ȣ̣ʬवʤˡޤ֤ѤȾƳξؤŶˤ¤СŶˤѥ󲽤뤿Υå󥰣ȣ̣ӣȣ̣ˡ
H01L21/28008	ƳΡΡȾƳŶˤη
H01L21/28017	ΤȾƳθ˷졤ȾƳΤꥳǤʤΡ<br><br><u></u><br><br>Υ롼פϥԥΤޤΤƳΤƱޤϥФǹԤѤޤ
H01L21/28026	ƳΤħΤΡʣȣ̣ͥˡ<br><br><u></u><br><br>ǽƳΤĶƳΤʤȤϥ֥롼ףȣ̣ȣ̣ˤäʬवʤˣȣ̣ʬव
H01L21/28035	ΤܤƳؤꥳ㡥Խʪͭޤͭʤݥꥷꥳ󡤤ǤΡʣȣ̣ͥˡ<br><br><u></u><br><br>ˤ㡥ꥳؤޤϥؤΤܤΤȤϹͤʤ
H01L21/28044	оʤȤ̤󥷥ꥳƳؤƳΡ
H01L21/28052	ж°ؤȥꥳȤΥꥵɲȿˤ줿ꥵؤƳΡʶ°ˤȣ̣ˡ
H01L21/28061	Ѥ줿°ޤ϶°ꥵɤޤƳΡ㡥ѥåˡʤꥵɲȿʤΤΡʣȣ̣ͥˡ<br><br><u></u><br><br>롼ףȣ̣ӣȣ̣ϰϤɾ뤿ᡤء㡥ԣӣΡϹθʤ
H01L21/2807	ΤܤƳؤӣޤϣǣޤϣäӣӣι⤫ʤΡ
H01L21/28079	ΤܤƳؤñ°㡥ԣᡤסͣ졤ʤΡ
H01L21/28088	ΤܤƳؤʣΡ㡥ԣΡʤΡ
H01L21/28097	ΤܤƳؤ°ꥵɤʤΡ
H01L21/28105	ΤܤƳΤޤϥɡԥ󥰤ѲͭΡޤϣʾϽйˤ겣˷ƤʤΡ
H01L21/28114	̷ħΤΡ㡥ԡգԡ<br><br><u></u><br><br>ϢȤʸϥ롼ףȣ̣ȣ̣ˤʬव
H01L21/28123	Х꥽ե˴Ϣ㡥֥꥽եĹʬΥ˴Ϣ㡥ǻʬΥ¦̤Ȥθ褹Ρʿóδ
H01L21/28132	ŶˤƳʬ¦ɥڡޤεˡǵꤵΡ㡥ޥƤλå
H01L21/28141	Ŷˤʬ¦ɥڡ㡥ߡڡޤεˡǵꤵΡ㡥ޥƤλå
H01L21/2815	ŶˤʬޤΤ¦ɥڡǤΤޤεˡ¤Ρ㡥ޥƤѴå
H01L21/28158	Τη
H01L21/28167	ñ뾽ꥳΡ㡥ΤѤ롤ʤŪ
H01L21/28176	кǽƳΤην㡥ˡ󥰡
H01L21/28185	ХηǤäơǽƳΤην㡥ˡ󥰡
H01L21/28194	ѤˤΡ㡥塤̣ġã֣ġѥå󥰡졼ѡʣȣ̣ͥˡ
H01L21/28202	ǴͭʷϵǹԤΡ㡥ⲽʪѡĹⲽ˥ⲽΣϻǮⲽңԣΡץ饺ⲽңУΡ
H01L21/28211	лǤޤϿѤʷϵǹԤΡ㡥ңԣϡؤ̲ᤷƤʤǤΡʣȣ̣ȣȣ̣ͥˡ<br><br><u></u><br><br>ؤȤƤΤޤϥХåեؤȤƤΡ㡥ݣηΤΡؤϡ켫νפǤ˸¤ꤳʬव
H01L21/2822	˴ĥɡԥ󥰤ȼΡ㡥Ρǣ塤ä
H01L21/28229	ء㡥°°ʪޤϥݥꥷꥳ󡤤Ѥ³ơ줬ؤѴΡ
H01L21/28238	еȼΡ
H01L21/28247	ŶˤΥѥå١ޤݸ㡥ƻѤΡ
H01L21/28255	ΤȾƳθ˷ΤǡȾƳΤɣ²°ƤΤǥꥳǤǤϤʤΡ㡥ǣ塤ӣǣ塤ӣǣá
H01L21/28264	ΤȾƳθ˷ΤǡȾƳΤϣɣɣɡݣֲʪǤΡ
H01L21/283	ήƳŶѤƳŤޤϽ
H01L21/285	ΤޤϾϽС㡥ŷ
H01L21/28506	Ƴؤ˴ؤΡ
H01L21/28512	мɣ²θǤʤȾƳξˤ
H01L21/28518	ХꥵɤʤƳءʣȣ̣ͥˡ
H01L21/28525	ȾƳʤƳءʣȣ̣ȣ̣ͥˡ
H01L21/28531	Хɥ륳󥿥Ȥη
H01L21/28537	ХåȥŶˤϽС
H01L21/2855	ʪŪʤˤΡ㡥ѥå󥰡ʣȣ̣ȣ̣ӣȣ̣ͥˡ
H01L21/28556	вŪʤˤΡ㡥ã֣ġ̣Уã֣ġУţã֣ġ졼ã֣ġʣȣ̣ȣ̣ӣȣ̣ޤǤͥˡ
H01L21/28562	ϽС
H01L21/28568	Ƴؤܶ°ʤΡʣȣ̣ͥˡ
H01L21/28575	Уɣɣɡݣ­ʪʤȾƳξˤ
H01L21/28581	ХåȥŶˤϽС
H01L21/28587	̤ηħΤΡ㡥ԡգԡ
H01L21/28593	оΤ̷
H01L21/288	ΤϽС㡥ŲդϽ
H01L21/2885	гήѤΡʤŵŪϽС
H01L21/30	ȣ̣ȣ̣ʬवʤˡޤ֤ѤȾƳΤνȾƳξؤŶˤ¤ȣ̣
H01L21/3003	пǤޤϽſźá㡥ץ饺ޤθҾǤѤΡ
H01L21/3006	Уɣɣɡݣ­ʪ˴ؤΡ
H01L21/302	ɽ̤ʪŪޤϷѴ뤿ᡤ㡥å󥰡ݥꥷ󥰡
H01L21/304	Ū㡥ࡤݥꥷ󥰡ǡСʣȣ̣ͥˡ
H01L21/3043	й¤η㡥ǡ
H01L21/3046	Х֥饹ƥ󥰡㡥ɥ֥饹ȡѤΡʣȣ̣ͥˡ
H01L21/306	ŪޤŵŪ㡥Ų򥨥å󥰡ؤηȣ̣
H01L21/30604	вŪå󥰡
H01L21/30608	аΥå󥰡ʣȣ̣ͥˡ
H01L21/30612	Уɣɣɡݣ­ʪΥå󥰡
H01L21/30617	аΥå󥰡
H01L21/30621	еꥨå󥰡
H01L21/30625	ƱŪѤΡ㡥ظ
H01L21/3063	Ų򥨥å
H01L21/30635	Уɣɣɡݭ²ʪΡ
H01L21/3065	ץ饺ޥå󥰡ȿ󥨥å
H01L21/30655	Хå󥰹ڤӥѥå١ߤ˷֤Ρ㡥ܥåˡ
H01L21/308	ޥѤΡʣȣ̣ȣ̣ͥ
H01L21/3081	Фι㡥¿إޥħΤΡ
H01L21/3083	ФοʿޤϿľʿǤ礭۸֡ưħΤΡ
H01L21/3085	йΤưħΤΡ㡥ޥϽХޥ
H01L21/3086	Хޥ㡥եȥեޥ¦ɡηޤϥޥν㡥˴ط빩ħΤΡ
H01L21/3088	ХޥβٸäŬѤ빩
H01L21/31	ȾƳξؤؤη㡥ޥѤޤϥեȥ꥾եåѤλѤˤΡŶˤأȣ̣أȣ̣ˡؤθ
H01L21/3105	
H01L21/31051	ؤʿóʣȣ̣ͥˡ
H01L21/31053	Ͷν˴ؤΡ
H01L21/31055	нŪå󥰹ǤΡ㡥ɥ饤å󥰡ʥå󥰤켫Σȣ̣ˡ
H01L21/31056	нŪإå󥰹ʤ롤㡥ޥ𤷤Ūɥ饤å󥰡
H01L21/31058	ͭؤ˴ؤΡ
H01L21/311	ؤΥå󥰡вŪޤʪŪʤˤΡʣȣ̣ͥˡ
H01L21/31105	̵ؤΥå󥰡
H01L21/31111	вŪʤˤΡ
H01L21/31116	Хɥ饤å󥰤ˤΡ
H01L21/31122	Уӣޤޤʤ㡥Уڣԡ죲ϣؤ˴ؤΡ
H01L21/31127	ͭؤΥå󥰡
H01L21/31133	вŪʤˤΡ
H01L21/31138	Хɥ饤å󥰤ˤΡ
H01L21/31144	ХޥѤΡ
H01L21/3115	ؤΥɡԥ
H01L21/31155	ХˤΡ
H01L21/312	ͭʪء㡥եȥ쥸ȡʣȣ̣ȣ̣ͥХեȥ쥸Ȥ켫Σǣáѡ<br><br><u>ٹ</u><br><br>롼ףȣ̣ݣȣ̣ϣǯʹʸʬ˻ȤƤʤ饰롼פƤϥ롼ףȣ̣ݣȣ̣غʬवƤ롥<br>롼ףȣ̣ݣȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L21/3121	ͭꥳ󲽹ʪʤء
H01L21/3122	Хݥꥷ󲽹ʪʤء
H01L21/3124	УȣӣѤʤء
H01L21/3125	Х饶󲽹ʪʤء
H01L21/3127	Хե륪ʥҥɥ˥ܥ󲽹ʪ㡥ݥƥȥե륪󡤤ʤء
H01L21/3128	Х󥰥ߥ奢ץåˡˤΡ
H01L21/314	̵ʪءʣȣ̣ȣ̣ͥ<br><br><u>ٹ</u><br><br>롼ףȣ̣ݣȣ̣ϣǯʹʸʬ˻ȤƤʤ饰롼פƤϥ롼ףȣ̣ݣȣ̣غʬवƤ롥<br>롼ףȣ̣ݣȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L21/3141	иϽˡѤϽСΣ̣ġϡ
H01L21/3142	ХʥΥߥ͡ء㡥죲ϣݣȣϣθߤءʤΡ
H01L21/3143	ⲽʪʪޤϻⲽʪθߤءޤϡʪʤΡ㡥ⲽʪؤλˤⲽʪη
H01L21/3144	ХꥳΤΡ
H01L21/3145	еΤޤϾϽФˤΡ
H01L21/3146	úء㡥ɥ饤ء
H01L21/3147	ΥԥϽС
H01L21/3148	úꥳء
H01L2021/3149	Х󥰥ߥ奢ݥ֥åˡ
H01L21/316	ʪޤϥ饹ʪޤϻʪäȤ饹ʤ<br><br><u>ٹ</u><br><br>롼ףȣ̣ϣǯʹʸʬ˻ȤƤʤΥ롼פƤϥ롼ףȣ̣ݣȣ̣غʬवƤ롥<br>롼ףȣ̣ݣȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L21/31604	еΤޤϾϽСʣȣ̣ȣ̣ͥˡ
H01L21/31608	УӣϣϽСʣȣ̣ȣ̣ӣȣ̣ͥˡ
H01L21/31612	ХꥳξΤΡ
H01L21/31616	У죲ϣϽС
H01L21/3162	ХꥳξΤΡ
H01L21/31625	ФۤǤޤդɡפ줿ꥳ㡥£ӣǡУӣǡ£УӣǡϽС
H01L21/31629	Хϥ󤬥ɡפ줿ꥳ㡥դźä줿ꥳ󡤤ϽС
H01L21/31633	úǤɡפ줿ꥳ㡥ӣϣáϽС
H01L21/31637	Х󥿥ʪ㡥ԣᣲϣϽС
H01L21/31641	Х륳˥ʪ㡥ڣϣϽС
H01L21/31645	Хϥե˥ʪ㡥ȣϣϽС
H01L21/3165	лˤΡʣȣ̣ȣ̣ͥˡ
H01L21/31654	ȾƳκ㡥μΡ˴ؤΡ
H01L21/31658	ǮˤΡ㡥ӣǣ˴ؤΡ
H01L21/31662	з礷Ƥʤ֤Υꥳ˴ؤΡ
H01L21/31666	Уɣɣɡݣ­ʪ˴ؤΡ
H01L21/3167	۶˻˴ؤΡ
H01L21/31675	Хꥳ˴ؤΡ
H01L21/31679	Уɣɣɡݣ­ʪ˴ؤΡ
H01L21/31683	ж°ء㡥ξϽФ줿졤˴ؤΡ㡥¿ﹽ¤Τη
H01L21/31687	۶˻ˤΡ
H01L21/31691	Хڥ֥ȷ¤ΤĤΡ
H01L21/31695	¿ʪޤ¿饹ʪޤϻʪäȤ¿饹ϽС
H01L21/318	ⲽʪʤ<br><br><u>ٹ</u><br><br>롼ףȣ̣ϣǯʹʸʬ˻ȤƤʤΥ롼פƤϥ롼ףȣ̣ݣȣ̣غʬवƤ롥<br>롼ףȣ̣ݣȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L21/3185	ⲽꥳ˴ؤΡ
H01L21/32	ޥѤ
H01L21/3205	ؤء㡥Ƴؤޤء塨ؤθŶˤ¤ȣ̣
H01L21/32051	ж°ؤޤ϶°ꥵؤ
H01L21/32053	ж°ꥵؤ˴ؤΡ
H01L21/32055	ȾƳء㡥ݥꥷꥳޤϥեꥳؤ
H01L21/32056	ƳͭؤޤȾƳͭؤʣȣ̣ͥˡ
H01L21/32058	ĶƳؤ
H01L21/321	
H01L21/32105	Хꥳޤؤλ
H01L21/3211	Хꥳޤؤⲽ
H01L21/32115	ʿó
H01L21/3212	вŪˤΡΣãͣСϡ
H01L21/32125	ήƱ̤ȤˤΡʤŵŪᡤ㡥ţãͣС
H01L21/3213	ؤʪŪޤϲŪå󥰡㡥ץǥݥ󤷤ؤѥ˥ؤ뤿
H01L21/32131	ʪŪʤΤߤˤΡ
H01L21/32132	Хꥳޤؤ˴ؤΡ
H01L21/32133	вŪʤΤߤˤΡ
H01L21/32134	бΥå󥰤ΤߤˤΡ
H01L21/32135	оå󥰤ΤߤˤΡ
H01L21/32136	Хץ饺ޤѤΡ
H01L21/32137	Хꥳޤؤ˴ؤΡ
H01L21/32138	ޤϸ㡥ѿ
H01L21/32139	ХޥѤΡ
H01L21/3215	ؤΥɡԥ
H01L21/32155	¿뾽ޤϥեꥳؤΥɡԥ󥰡
H01L21/322	ȾƳΤβѡ㡥Դη
H01L21/3221	ХꥳΡ㡥å󥰤˴ؤΡ
H01L21/3223	пǤޤϴˤ줿ƶѤΡ
H01L21/3225	Хȥ󥷥åå󥰤Τ᥷ꥳ¸ߤǤѤƷ٤ǮŪͶȯΡʣȣ̣ͥˡ<br><br><u></u><br><br>ȥååˡӥȥ󥷥ååˡξѤ륲å󥰤ϣȣ̣ȣȣ̣ξʬव
H01L21/3226	ξΥꥳ˴ؤΡ
H01L21/3228	Уɣɣɡݣ­ʪ˴ؤΡ㡥Ⱦˤ뤿ΤΡ
H01L21/324	ȾƳΤѤ뤿Ǯ㡥ˡ󥰡󥿥󥰡ʣȣ̣ȣ̣ȣ̣ȣ̣ͥ
H01L21/3242	ԽʪɲäʤˣУܹ뤿ΤΡʣȣ̣ͥˡ
H01L21/3245	Уɣɣɡݭʪ
H01L21/3247	зѹ㡥ɽ̤ʿ경ѡ<br><br><u>ٹ</u><br><br>롼ףȣ̣ϥ롼ףȣ̣ʸκʬब̤Ǥ롥<br>롼ףȣ̣ӣȣ̣ץ꡼ȥ뤿˹θ٤Ǥ롥
H01L21/326	ήޤųղá㡥쥯ȥեߥѡʣȣ̣ȣ̣ȣ̣ȣ̣ͥ
H01L21/34	Խʪ㡥ɡԥ󥰺ޤޤϴޤޤʤУȣ̣ȣ̣ѡȣ̣ȣ̣ӣȣ̣ʬवʤȾƳΤͭ
H01L21/38	ȾƳΤؤΤޤȾƳΤΤޤȾƳΰ֤Խʪ㡥ɡԥ󥰺Ŷ˺γȻ
H01L21/383	꤫ΤؤΤޤϸΤ鵤ؤγȻѤ
H01L21/385	ꡤ㡥ɡפ줿ʪءΤؤΤޤϸΤؤγȻѤ
H01L21/388	꤫ΤؤΤޤϸΤؤγȻѤΡ㡥Ȼˡ
H01L21/40	ȾƳΤԽʪ㡥ɡԥ󥰺Ŷ˺ι
H01L21/42	ռξȼ
H01L21/423	⥨ͥ륮ռͭ
H01L21/425	ˡʶɽŪʽΤΥӡɣȣʣ
H01L21/426	ޥѤ
H01L21/428	żȡ㡥졼Ѥ
H01L21/44	ȣ̣ȣ̣ʬवʤˡޤ֤ѤȾƳξؤŶˤ¤
H01L21/441	ŶѤƳŤޤϽ
H01L21/443	ΤޤϾϽС㡥ŷ
H01L21/445	ΤϽС㡥ŲդϽ
H01L21/447	ϤŬѤޤΡ㡥Ǯˡ
H01L21/449	Ūư㡥ĶȿưŬѤޤ
H01L21/46	ȣ̣ʬवʤˡޤ֤ѤȾƳΤνȾƳξؤŶˤ¤ȣ̣
H01L21/461	ɽ̤ʪŪޤϷѴ㡥å󥰡ݥꥷ󥰡
H01L21/463	Ū㡥ࡤĶȽ
H01L21/465	ŪޤŵŪ㡥Ų򥨥å󥰡ؤηȣ̣
H01L21/467	ޥѤ
H01L21/469	ȾƳξؤؤη㡥ޥѤޤϥեȥ꥽եåѤλѤˤΡŶˤأȣ̣أȣ̣ˡؤθ
H01L21/47	ͭʪء㡥եȥ쥸ȡʣȣ̣ȣ̣ͥ
H01L21/471	̵ʪءʣȣ̣ȣ̣ͥ
H01L21/473	ʪޤϥ饹ʪޤϻʪäȤ饹ʤ
H01L21/475	ޥѤ
H01L21/4757	
H01L21/47573	ؤΥå󥰡
H01L21/47576	ؤΥɡԥ󥰡
H01L21/4763	ؤء㡥Ƴءء塨ؤθŶˤ¤ȣ̣Уȣ̣ѡ
H01L21/47635	Фؤθ
H01L21/477	ȾƳΤβѤΤǮ㡥ˡ󥰡󥿥󥰡ʣȣ̣ȣ̣ȣ̣ȣ̣ͥ
H01L21/479	ήޤųղá㡥쥯ȥեߥѡʣȣ̣ȣ̣ȣ̣ȣ̣ͥ
H01L21/48	֤ΩΩġʡ㡥ƴ¤ޤϽǤäơ֥롼ףȣ̣ȣ̣ΰĤʬवʤˡѤΡʡФΤ֣ȣ̣Υ꡼ߣȣ̣ѡƴȡŶޥȤ켫Σȣ̣ʤΥޡդȣ̣ѡ<br><br><u></u><br><br>Υ롼פˤƤϡȤɽʤΥ꡼ɤνޤ
H01L21/4803	魯ޤ蘆줿ʡ㡥ޥȡƴɥҡȥ󥯡ʣȣ̣ͥ表ϩģȣˣˡ
H01L21/4807	Хߥåʡ
H01L21/481	Х᥿饤ͭޤͭʤʾء
H01L21/4814	Ƴʡ
H01L21/4817	ƴ㡥åסΤΤΡʣȣ̣ͥˡ
H01L21/4821	ʿóʥ꡼ɡ㡥ٻΤͭޤͭʤ꡼ɥե졼
H01L21/4825	ʿóʥ꡼ɡ㡥磻䡤Хס¾ʿóʥ꡼ɡؤΤޤϤ¾Υ꡼ɤ³ޤǡ
H01L21/4828	Хå󥰡ʥѥ˥󥰤뤳ȤŪȤå󥰣ȣ̣ˡ
H01L21/4832	Х꡼ɷΤȹ˲Ĥ򥨥å󥰤Ρ
H01L21/4835	㡥ȾĤν
H01L21/4839	ʿóʥ꡼ɤٻΤΩ㡥ԣѡ
H01L21/4842	еŪ㡥ѥ󥰡ǡѷְܡ
H01L21/4846	魯ޤ蘆줿ľޤϴΥ꡼ɡ㡥᥿饤ʣȣ̣ͥ表ߥåζ°̣ã£ϩȣˣˡ
H01L21/485	߷Ŭ粽㡥󥸥˥󥰥㡼ڥѡ
H01L21/4853	Х᥿饤㡥ԥ󡤥磻䡤ХסؤΤޤϤ¾Υ꡼ɤ³ޤǡ
H01L21/4857	¿شġñشľ¿إ᥿饤ȣ̣ˡ
H01L21/486	Хԥ̵ͭʤĤ̤ӥ³
H01L21/4864	㡥ȾĤν
H01L21/4867	ХڡȤޤϥ󥯤ۡ㡥꡼ʣȣ̣ͥˡ
H01L21/4871	д桤Ĥޤϥҡȥ󥯡
H01L21/4875	дޤĤؤΤޤϤ¾Υ꡼ɤ³ޤǡ
H01L21/4878	еŪ㡥ѷ
H01L21/4882	ХҡȥʤΩ
H01L21/4885	Х磻ʤޤϥԥʥ磻ܡη£ˣȾƳΤޤ¾θΤ³˴ؤˡȣ̣ˡ<br><br><u>ٹ</u><br><br>Υ롼פӥ֥롼פʸΤȾƳΤޤ¾θΤ³˴ؤˡ򰷤Τϣȣ̣˷³Ū˺ʬवƤ
H01L21/4889	Х磻ʡ㡥磻䡤ؤΤޤϤ¾Υ꡼ɤ³ޤǡ
H01L21/4892	
H01L21/4896	еŪ㡥ǡʤ
H01L21/50	֥롼ףȣ̣ȣ̣ΰĤʬवʤˡޤ֤ѤȾƳ֤Ω㡥ƴδФ륭åפߡ<br><br><u></u><br><br>ȾƳΤޤ¾θΤ³ޤǤΤμʡޤϤ˴ϢˡǤäơ³֥롼פޤʤ֤ޤˡϣȣ̣ޤ
H01L21/52	ƴؤȾƳΤΥޥ
H01L21/54	ƴؤνŶ㡥Ŷ
H01L21/56	ȡ㡥ءʤ
H01L21/561	ХХå
H01L21/563	Хեåסå֤γ̤ȡ㡥եåסåפΥե󥰤ޤϥ󥭥ץ졼󡤥å׾ޤϼմľѥץե
H01L21/565	Х⡼ɡ
H01L21/566	Х⡼ɤΤΥء㡥Υء⡼λ֤˹ء
H01L21/568	ȹٱ礹뤿˻ѤŪʴġʣȣ̣ӣȣ̣ͥˡ
H01L21/60	
H01L2021/60007	ХϥդޤϹⲽޤΡ
H01L2021/60015	Хץ졼ȥͥ㡥ء졤ѤΡ
H01L2021/60022	ХХץͥѤΡ㡥եåץåץޥȤΤΤΡ
H01L2021/6003	ФΤ֡
H01L2021/60037	¨ܥǥ󥰡
H01L2021/60045	Хܥǥ󥰤ΩĥХץͥ
H01L2021/60052	лʪ㡥եå
H01L2021/6006	֤ΰǤϤʤŪʻٻࡤ㡥ǽʤ졤ޤϴġͭΡ
H01L2021/60067	ХХץͥȼմĤȤΰֹ碌
H01L2021/60075	ǽưŪʰֹ碌ޤΡʤƥ֤ˤΡ㡥ֹ碌ޡ󥵤ѤΡ
H01L2021/60082	мưŪʰֹ碌ޤΡ㡥ɽ̥ͥ륮ȿǮʿդѤΡ
H01L2021/6009	а⹽¤㡥ܥǥ󥰤ʤ˾ʤȤʬĤ빽¤ڡޤΡ
H01L2021/60097	Хͥ륮Ŭѡ㡥ϥդޤϹⲽΤΤΡ
H01L2021/60105	żȤѤΡ
H01L2021/60112	Хҡռʤ졼
H01L2021/6012	󥳥ҡռ㡥¿Ǯס
H01L2021/60127	ͶƳǮʤή
H01L2021/60135	ήѤΡ㡥եϧ
H01L2021/60142	зв٥ץեͭΡ
H01L2021/6015	ƳѤΡ㡥åҡǮ
H01L2021/60157	зв٥ץեͭΡ
H01L2021/60165	ŻҥӡѤΡ
H01L2021/60172	ŰѤΡ
H01L2021/6018	аŰ
H01L2021/60187	ж㡥ޤϹⰵΤѤæ
H01L2021/60195	ưŪϤѤΡ㡥ĶȤޤĶǮ
H01L2021/60202	ݸʷϵѤΡ㡥եߥ󥰥ޤϥɥˤΡ
H01L2021/6021	мʿȿѤΡ
H01L2021/60217	ХХץͥμ곰㡥
H01L2021/60225	ХޥȤΩĥХץͥ֡
H01L2021/60232	ХХ֥ͥȾƳΥåפξˤΤ֤Ρ
H01L2021/6024	ХХ֥ͥմĤξˤΤ֤Ρ
H01L2021/60247	ХХ֥ͥȾƳΥåפȼմĤξξ֤Ρ㡥ХפФХס
H01L2021/60255	ХХ֥ͥץڥ㡥ߤƤΡȤߤƤΡ
H01L2021/60262	ХޥȤΩĥХץͥ¦ʬۡ
H01L2021/6027	ȾƳƳؤΥޥȡ
H01L2021/60277	ƳޤλѤޤΡ
H01L2021/60285	ХϥդιⲽѤ뤳ȤʤŪʤλѤޤΡ㡥³
H01L2021/60292	Żҥӡޤϥ졼λѤޤΡ
H01L21/603	
H01L21/607	
H01L21/62	Ű̾ɤޤɽ̾ɤ⤿ʤ
H01L21/64	ȾƳְʳθ֤ޤϤʤ¤ޤϽǤäơ롼ףȣ̣ȣ̣ʬवƤĤη֤ͭǤʤ
H01L21/67	¤ޤϽȾƳΤޤŵŪ֤μ谷äŬѤ֡ȾƳΤޤŵŪ֤⤷Ϲʤ¤ޤϽΥϤμ谷äŬѤ֡¾ʬսΤʬवʤ֡ˡ켫Σȣ̣ȣ̣ȣ̣ñǰŪʻٻʡ㡥ޡŵŪޤϼŪʤλѣȣ̣ȣ̣ȾƳΤޤϸΤ³ޤϼ곰μʵڤӤ˴ϢˡΤ֣ȣ̣ˡ<br><br><u></u><br><br>Υ֥롼פˤơĤȤѸȾƳΤޤŵŪ֤ޤϹʤޤϥϤ̣
H01L21/67005	¾ʬսΤʬवʤ֡ˡ켫Σȣ̣ȣ̣ȣ̣ñǰŪʻٻʡ㡥ޡŵŪޤϼŪʤλѣȣ̣ȣ̣ˡ
H01L21/67011	¤ޤϽΤ֡ˡȣ̣ȣ̣ñ뾽ޤ϶Ѽ¿뾽¤ޤϸΤΤΣã£ˡ
H01L21/67017	ήνΤ֡ʣȣ̣ȣ̣ͥˡ
H01L21/67023	аŪήν㡥³å󥰡ΤΤΡ
H01L21/67028	д硤Υ֥饹Ȥޤν³ΤΤΡ
H01L21/67034	дΤΤΡ
H01L21/6704	ХåޤϿΤΤΡ
H01L21/67046	м˥ּʡ㡥֥饷ѤΡ
H01L21/67051	м˥ץ졼ʡ㡥Υ롤ѤΡ
H01L21/67057	ȾƳδĤޤƴؤοҤȼΡ
H01L21/67063	Хå󥰤ΤΤΡ
H01L21/67069	Хɥ饤å󥰤ΤΤΡ
H01L21/67075	Хåȥå󥰤ΤΤΡ
H01L21/6708	м˥ץ졼ʡ㡥Υ롤ѤΡ
H01L21/67086	ȾƳδĤޤƴؤοҤȼΡ
H01L21/67092	еŪΤ֡ʤޤϸޤǡ֥饹£¤ޤϣ£ĤδϢ롼פ򻲾ȡˡ
H01L21/67098	ǮΤ֡
H01L21/67103	мƳˤΡ
H01L21/67109	мήˤΡ
H01L21/67115	мռͤˤΡ
H01L21/67121	¾ʬवʤΩΤ¤Τ֡㡥ѥåΩƤΤΤΡ
H01L21/67126	ߡȡ饹ݤȽޤνΤ֡ˡȣ̣ȣ̣ˡ
H01L21/67132	ľ֤뤿֡㡥ơס
H01L21/67138	ȾƳΤޤϸ֤Τ֡
H01L21/67144	ƳμդΤ֡㡥ľΥ꡼ɥե졼ޤƳΡ
H01L21/6715	бΡ顤󥯤ޤʪŬѤ뤿֡ʣȣ̣ͥˡ
H01L21/67155	ʣΥơ¤ޤϽ뤿֡
H01L21/67161	ХץФΥ쥤ȤħΤΡ
H01L21/67167	ФϤΡ
H01L21/67173	а֤Ρ
H01L21/67178	нĤ֤Ρ
H01L21/67184	Фİʾ夢뤳ȤħΤΡ
H01L21/6719	ХץФι¤ħΤΡ㡥⥸顼ץС
H01L21/67196	Фι¤ħΤΡ
H01L21/67201	ХɥåФι¤ħΤΡ
H01L21/67207	ιŬѤФʤΡ
H01L21/67213	оʤȤ⣱ĤΥޤŻҥӡФʤΡʥˤʤãáޤŻҥӡɣȣʣˡ
H01L21/67219	оʤȤ⣱ĤθФʤΡʸ֣£¡ˡ
H01L21/67225	оʤȤ⣱ĤΥ꥽եФʤΡʥ꥽եå֣ǣƣˡ
H01L21/6723	оʤȤ⣱ĤΥåФʤΡ̵Ųå֣ãáŵå֣ãġˡ
H01L21/67236	¤ĤȾƳΥϤǤʤΡ㡥꡼ɥե졼ޤϥåס
H01L21/67242	дƻ롤Ȥޤϥޡ󥰤뤿֡¤λޤ¬ȣ̣ɸ켫Σȣ̣ġȾƳ֤λǣңˡ
H01L21/67248	вٴƻ
H01L21/67253	йƻ롤㡥ή̤ޤϸδƻ
H01L21/67259	аִƻ롤㡥֤θ긡Τޤ¸߸Ρ
H01L21/67265	ƴݴɸˡꥢܡȤޤʪݴɤ줿Ĥΰִƻ
H01L21/67271	Х֡
H01L21/67276	եδƻ롤㡥롼ץåȸΤʥץ楷ƥऽ켫Σǣ£㡥Ūǣ£ˡ
H01L21/67282	Хޡ֡
H01L21/67288	ȿꡤѶʡ»٤ޤδƻ
H01L21/67294	м̼ʤѤΡ㡥ľΥ٥ޤƴΥ٥
H01L21/673	äŬ礷ꥢѤΡФޤϻٻΡùʪ򥭥ꥢٻΤ˸ꤹΡưδ֤ٻٻΣȣ̣ˡ
H01L21/67303	дĤʿ˻ٻľܡȷΥꥢ㡥ǤʤΡ
H01L21/67306	кƤʤޤħΤΡ
H01L21/67309	дĻٻħΤΡ
H01L21/67313	дĤľ˻ٻʿܡȷΥꥢ㡥ǤʤΡ
H01L21/67316	кƤʤޤħΤΡ
H01L21/6732	дĤʿ˻ٻɷǤʤľꥢ㡥ɥ뤫ʤΡ
H01L21/67323	кƤʤޤħΤΡ
H01L21/67326	дĤľ˻ٻɷǤʤʿꥢɥ뤫ʤΡ
H01L21/6733	кƤʤޤħΤΡ
H01L21/67333	Хåѥȥ졼ʹʤΤΥޥȣˣˡ
H01L21/67336	кƤʤޤħΤΡ
H01L21/6734	緿η򤷤Ĥٻ뤿äŬ礷Ρʥ饹Ѥƴ浪ǣ£ģ¤Υ饹ʤα£ã£ˡ
H01L21/67343	кƤʤޤħΤΡ
H01L21/67346	ñĤλٻΤäŬ礷Ƥ뤳ȤޤϤΤ褦ʻٻѤ߽Ťͤ¤ʤ뤳ȤħΤΡ
H01L21/6735	Ĥꥢ
H01L21/67353	ñĤΤäŬ礷Ρ
H01L21/67356	Хåסޤϣɣäޤ뤿äŬ礷Ρ
H01L21/67359	Хޥޤϥڥꥯޤ뤿äŬ礷Ρ
H01L21/67363	ХϰʳδĤޤ뤿äŬ礷Ρʣȣ̣ȣ̣ͥˡ
H01L21/67366	кƤʤޤħΤΡʼͽ˴Ϣ£ãβʬạ̃ˡ
H01L21/67369	д˾ǤħΤΡ㡥ݻޤϥå
H01L21/67373	ХåƥħΤΡ
H01L21/67376	̩֤ħΤΡ
H01L21/67379	зѤǡưࡤϥɥޤϳ鰮ǤħΤΡ
H01L21/67383	дĻٻħΤΡ
H01L21/67386	Ĥꥢι¤ħΤΡ
H01L21/67389	絤ħΤΡ
H01L21/67393	Ĥꥢ¦ˤޤϼդƤʷϵѹǤ¸ߤħΤΡ
H01L21/67396	ɻǤ¸ߤħΤΡ
H01L21/677	ΤΤΡ㡥ۤʤơ֤Ǥΰ
H01L21/67703	аۤʤơ֡
H01L21/67706	еŪ㡥顼٥ȡʣȣ̣ͥˡ
H01L21/67709	мŪǤλѡ
H01L21/67712	дĤ¼Ū˿ľ˼갷Ρ
H01L21/67715	Х٥䡼ѤΡ
H01L21/67718	дĤθѤΡ㡥ʿ֤ľ֤ˡ
H01L21/67721	ȾƳΥϤǤ緿ʿóʴĤǤʤ¤ġ㡥åס꡼ɥե졼ࡤȣ̣ͥ
H01L21/67724	ХȤޤϼξμʤˤΡ
H01L21/67727	йα·ϩΰŪʷײλѡ
H01L21/6773	бѥåȡƴޤϥꥢ
H01L21/67733	Ƭ屿¡
H01L21/67736	Х٥䡼ؤΥǥ󥰡ޤϥ٥䡼Υǥ󥰡
H01L21/67739	ХץФؽФ줹Ρ
H01L21/67742	аư֤εŪʬʥܥåỌ̇̄£ʡˡ
H01L21/67745	аư֤ưޤưήħΤΡ
H01L21/67748	ñùʪοʿư
H01L21/67751	ñùʪοľư
H01L21/67754	ХХåùʪοʿư
H01L21/67757	ХХåùʪοľư
H01L21/6776	ХץФ˷³Ūʥǥ󥰤ӥǥ󥰡㡥ץαѥ٥ȡ
H01L21/67763	Хǥ󥰤ӥǥ󥰤ޤࡤꥢݴɤ륦ϡʣȣ̣ͥˡ
H01L21/67766	аεŪʡʥܥåỌ̇̄£ʡˡ
H01L21/67769	¸ʡ
H01L21/67772	г⡤Сμ곰ޤΡ
H01L21/67775	Хɥå֡
H01L21/67778	ХϤΥǥ󥰤ӥǥ󥰤ޤΡ
H01L21/67781	ХϤΰ
H01L21/67784	ХȥåѤΡ
H01L21/67787	вùʪγդԤΡ
H01L21/6779	Хǥ󥰤ӥǥ󥰤ޤࡤꥢݴɤùʪ
H01L21/67793	пưܥޤϥȥåμʤˤᤪӰַԤΡ
H01L21/67796	вùʪγ٤ԤΡʣȣ̣ӣȣ̣ͥˡ
H01L21/68	ַᡤᡤޤΤΤΡʱ¤ΤΤΣȣ̣<br><br><u>ٹ</u><br><br>Υ롼פϺǤ롣Ūˤϥ롼ףȣ̣⻲
H01L21/681	иŪʤѤΡ
H01L21/682	ХޥȥϤΰֹ碌ʰ̣ǣƣǣƣˡ
H01L21/683	ٻޤĻΤΤΡʰΤΤΣȣַ̣ᡤᡤޤΤΤΣȣ̣
H01L21/6831	ťåѤΡ
H01L21/6833	ťåκ
H01L21/6835	ٻŪ˻ѤΡ<br><br><u></u><br><br>֤κϣȣ̣ӥ֥롼פ򤵤줿ǥ󥰥ɤѤƤ˥ǥå
H01L21/6836	Хϥơס㡥ޤϥ󥰻ٻơסơװ̣ãʣˡ
H01L21/6838	пѤ֤ĻݻΡ٥̡֡
H01L21/687	ŪʤѤΡ㡥åסޤϥԥСťåѤΣȣ̣ˡ
H01L21/68707	ХϤܥåȤΥ֥졼ɤξ˥åȤޤΤĻĻΡ
H01L21/68714	ХϤ򥵥ץơޤϻٻΤξ˥åȤΡ
H01L21/68721	¦說פħΤΡ㡥ץ󥰡
H01L21/68728	ʣʬΥ줿ħΤΡ㡥ץե󥬡
H01L21/68735	ṳ̈ޤϻٻ̤ħΤΡ
H01L21/68742	л夲ȤߤħΤΡ㡥եȥԥ
H01L21/6875	ʣθ̤λٻħΤΡ㡥ٻݥȤޤͽ
H01L21/68757	ʤޤϹŤޤϺħΤΡ
H01L21/68764	вưΥץơޤϻٻΤǤäơ켫Ȥοľ濴˲žΤΤΤħΤΡ㡥ž٥䡼Υץ
H01L21/68771	УʾȾƳδĤٻ뤳ȤħΤΡ
H01L21/68778	Хϰʳδġ㡥åסٻ뤳ȤħΤΡ
H01L21/68785	ХץơޤϻٻΤεŪ¤ħΤΡ
H01L21/68792	ХեȤι¤ħΤΡ
H01L21/70	Ĥζ̴ޤϾ˷줿ʣθιʤʤ֤ޤϤʤ¤ޤϽѲϩ֤ޤϤʤ¤ʡи̤ȾƳΤޤ¾θ֤ʤΩΤ¿ʳȣ̣ѡͽ줿ŵŪʤʤΩΤ¤ȣˣȣˣ
H01L21/702	иޤϩޤϤʤΡ
H01L21/705	иϩޤϤʤΡ
H01L21/707	ϩޤϤʤΡ
H01L21/71	롼ףȣ̣Ǹꤵ줿֤ʤ¤ʡУȣ̣ȣ̣ѡȣ̣ȣ̣ȣ̣ͥ
H01L21/74	жɽŪʡΰη㡥ߥ쥯ء³д
H01L21/743	³η
H01L21/746	Уɣɣɡݣ£ֽѲϩΤΤΡ
H01L21/76	ʴ֤ʬΥΰη
H01L21/7602	УӣòʪʤǽưĤ˷줿ʴ֤ФΡ
H01L21/7605	Уɣɣɡݣ£ֲʪʤǽưĤ˷줿ʴ֤ФΡ
H01L21/7607	Уɣɡݣ֣ɲʪʤǽưĤ˷줿ʴ֤ФΡ
H01L21/761	Уܹ
H01L21/762	Ͷΰ衤㡥ţУɣͶʬΥ̣ϣãϣӡȥƽŶѡӣϣɵѡͥ륹ȥåѤλѡ
H01L21/76202	Хꥳɽ㡥̣ϣãϣӡӣףͣɡӣɣ̣ϡѤΡʣȣ̣ͥ表ľʬΥ㡥ӣϣɴĤˤ̣ϣãϣӡȣ̣ˡ
H01L21/76205	ɽ̤αΰ衤㡥ꥻ¡֤ޤϥȥΰ衤ˤΡ
H01L21/76208	Хꥻΰˤԥ顼ѤΡ㡥Ĺΰۤƣ̣ϣãϣӤΡ
H01L21/7621	Ĺʳη㡥ݷޤϼФͭꥻΰʣȣ̣ͥˡ
H01L21/76213	жɽΰŵŪԳޤϳԽʪƳ㡥̣ϣãϣӻĹѹޤɲäʬΥŪ
H01L21/76216	Хͥ륹ȥåѤŪΤζɽΰؤŵŪ˳ԽʪƳ
H01L21/76218	Хͥ륹ȥåѤŪΤζɽΰؤŵŪ˳ξηԽʪƳ㡥ŪԽʪƳΰʬΥ
H01L21/76221	ʣϢ³ŪʶɽʳͭΡ
H01L21/76224	Ͷκȥ˽ŶΡ¿뾽ꥳߤ줿ȥ˽ŶΣȣ̣ľʬΥ㡥ӣϣɴĤߤ줿ȥ˽ŶΣȣ̣ˡ
H01L21/76227	¿뾽ꥳ󡤶°ͶκβŪѴˤͶκ
H01L21/76229	аۤʤȥηޤˡ㡥ӣַȥӶȥӿȥͭ¿ΥȥƱŶ
H01L21/76232	жޤϣַʳηĥȥ㡥ݷФޤϴݷȥɡʣȣ̣ͥˡ
H01L21/76235	ХꥳζɽʳǷѤ줿ȥ㡥̣ϣãϣӤˤȥδݤ
H01L21/76237	Хȥ¦ɤޤɤؤԽʪƳ㡥ͥ륹ȥåѤηޤʬΥưѲΤΤΡ
H01L21/7624	ξȾƳΡΣӣϣɡϵѤѤΡʣȣ̣ͥ表ľνѲϩ¤ȣ̣եΥꥳΣӣϣӡϵѣȣ̣ˡ
H01L21/76243	ء㡥ʪءޤ줿ꥳѤΡʤӣɣͣϣصѡѤΡ
H01L21/76245	¿ꥳˤ봰ʬΥʤƣɣУϣӵѡѤΡ
H01L21/76248	вĹѡʤţ̣ϵѡѤΡ
H01L21/76251	Хܥǥ󥰵ѤѤΡ
H01L21/76254	Хؤ˱äƤʬΥΥ㡥ޡȥåȡ˥ܥɡѤΡ
H01L21/76256	ХꥳΥåХåѡ㡥£ţӣϣɡţ̣ԣңΡѤΡ
H01L21/76259	¿ؤ˱äƤʬΥΥѤΡ
H01L21/76262	ñ뾽ꥳϽСʤӣţǵѡѤΡ
H01L21/76264	вʬΥӣϣɡ㡥ꥳζɽޤͶΤޤ¿뾽ǺƽŶȥޤ϶ʬΥΰ衤㡥ʬΥ줿ȾƳΤ硤ѤΡ
H01L21/76267	Хꥳޤ줿ء㡥ʪءˤľʬΥʤӣɣͣϣصѡ
H01L21/7627	¿ꥳˤ봰ʬΥʤƣɣУϣӵѡˤľʬΥ
H01L21/76272	вĹѡʤţ̣ϵѡˤľʬΥ
H01L21/76275	Хܥǥ󥰵ѤˤľʬΥ
H01L21/76278	ñ뾽ꥳϽСʤӣţǵѡˤľʬΥ
H01L21/76281	Хꥳˤ벣ʬΥ
H01L21/76283	ͶκǤΥȥκƽŶˤ벣ʬΥ
H01L21/76286	¿뾽ǤΥȥκƽŶˤ벣ʬΥ
H01L21/76289	жˤ벣ʬΥ
H01L21/76291	ų̤ˤ벣ʬΥ
H01L21/76294	ñ뾽ꥳϽСʤӣţǵѡѤΡ
H01L21/76297	УţУɣõѡʤ졡䡡䡡ѡѤͶʬΥ
H01L21/763	¿뾽ȾƳΰСʣȣ̣ͥˡ
H01L21/764	Сʣȣ̣ͥˡ
H01L21/765	ų̤ˤΡСʣȣ̣ͥˡ
H01L21/768	ƳΤͶΤȤޤ̸Ĥιʴ֤ήήѤ³ŬѤ<br><br><u></u><br><br>ȣ̣ȣ̣ϡ³¤뤿¿ʳޤ롥<br>ñ칩ͭξб륰롼פˤʬव롤㡥<br>ȣ̣<br>å󥰣ȣ̣ȣ̣<br>ޥ󥰣ȣ̣ȣ̣ȣ̣ȣ̣<br>ʿóȣ̣ȣ̣
H01L21/76801	ͶΤηӸħΤΡ㡥ʿ경
H01L21/76802	ͶΤؤγηˤΡ
H01L21/76804	зХӥۡηˤΡ
H01L21/76805	вƳΤӥޤϥ󥿥ȥۡǤ볫
H01L21/76807	Хǥ奢ޥ¤ΤΤΡ
H01L21/76808	аŪߺޤΡ
H01L21/7681	УʾߥޥޤΡ
H01L21/76811	¿إץѥޥޤΡ
H01L21/76813	ʬŪʥӥΥåޤΡ
H01L21/76814	ޤϸ㡥ƳξλʪޤϽ
H01L21/76816	Хѥ쥤ȡޤϡӥޤϥȥΥ˴Ϣ³Υ쥤Ȥ켫Σȣ̣ɣäΣãġǣƣˡ
H01L21/76817	аޤϥ׵ѤѤΡ
H01L21/76819	ͶΤʿ경켫Τʿóȣ̣ˡ
H01L21/7682	жޤͶΡ
H01L21/76822	Ͷؤκβ㡥ᡤؤΰ塤̩ٸΤθ
H01L21/76823	ؤƳؤؤѴ
H01L21/76825	ؤγؤ˽ϪˤΡ㡥գ֤ޤŻξȼ͡ʥץ饺޽ȣ̣ˡ
H01L21/76826	ؤεΡΤޤϥץ饺ޤȤܿˤ
H01L21/76828	Ǯ
H01L21/76829	ǽͶؤηħΤΡ㡥Ͷťåȥåءءåؤޤϥ饤ء
H01L21/76831	ХӥۡޤϥȥǤΤΡ㡥Ƴɥ饤ʡ
H01L21/76832	¿ء
H01L21/76834	ƳΤ¦ɾޤϾ¦ؤؤηʣȣ̣ͥˡ
H01L21/76835	ͶΨͭ롤ʾΰۤʤͶؤȤ߹碌ʣȣ̣ͥˡ
H01L21/76837	ܤƳδ֤ߡͶΤΥå׽Ŷ
H01L21/76838	ƳΤηӸħΤΡƳΤΥѥ˥󥰤ΤΥå󥰣ȣ̣ˡ<br><br><u></u><br><br>Ϣ뤬ƳΡΡȾƳΤŶˤƳʬȤƤȤʥȥ٥ϢˡʸϴϢŶ¤롼פʬव롤㡥ȣ̣
H01L21/7684	ʿ경ʿó
H01L21/76841	оءؤޤϥ饤ء
H01L21/76843	ͶΤγؤη
H01L21/76844	ʤ饤ʡ
H01L21/76846	ؤȤ߹碌
H01L21/76847	м߶°ؤ֤Ρ
H01L21/76849	м߶°ؤ֤Ρ
H01L21/7685	Ƴι¤ʤءʣȣ̣ͥˡ
H01L21/76852	Ƴι¤¦ʤء
H01L21/76853	θʳħΤΡ
H01L21/76855	ؤ˾ʤȤ⣱ɲäθǤƳ
H01L21/76856	Хץ饺ޤޤϥδĶǤν㡥ͻ°饤ʤⲽˤΡ
H01L21/76858	й⸵ǤγȻˤΡ
H01L21/76859	ХˤΡ
H01L21/76861	ɲäβظǤؤƳʤޤϸ
H01L21/76862	γҤξ׷ˤΡ㡥ץ饺޽գ־ȼ͡
H01L21/76864	Ǯ
H01L21/76865	ؤΰʬŪʣȣ̣ͥˡ
H01L21/76867	Уã֣ġУ֣ĤޤϱΤϽаʳˡˤħΤΡʣУ֣ġȣ̣ã֣ġȣ̣ΤϽУȣ̣ˡ
H01L21/76868	Ϣ³ηޤϢ³Ф㡥Ϣ³νޤ䶯
H01L21/7687	Хǥ󥵡ؤΥ󥿥Ȥ˴ط
H01L21/76871	Фʤؤγ¥ʤޤϲǽˤ뤿äѤءʤء
H01L21/76873	ŲåΤΤΡ
H01L21/76874	̵ŲåΤΤΡ
H01L21/76876	е꤫ϽС㡥ã֣ġΤΤΡ
H01L21/76877	Ƴźˤ빦¤ޤϥȥ㡥ӥߡ
H01L21/76879	ХӥؤƳźϽС㡥ȾƳκؤã֣ġåˤΡȾƳκؤΥạ̊ȣ̣ˡ
H01L21/7688	еޥؾؤϽФˤΡ㡥եȥաʥեȥդ켫Σȣ̣ˡ
H01L21/76882	Х󥿥ȥۡɤŶ뤿ΥեޤϰϤΰá
H01L21/76883	Ƴźޤϸ
H01L21/76885	ݸϽƳηˤΡ㡥ԥ顼åɡ
H01L21/76886	ƳΥѥޤƳΨαʵŪޤϰŪʽ㡥ηܿ񹳤㸺
H01L21/76888	ƳΤξʤȤΥ󥰤ˤƳŲ㡥ˤΡ
H01L21/76889	йͻ°ΥꥵɤηˤΡ
H01L21/76891	ĶƳλѤˤΡ
H01L21/76892	Хѥν
H01L21/76894	Х졼ѤˤΡ㡥졼ǡ졼ľ졼
H01L21/76895	жɽ³õʸţУ㼨줿褦ʶɽѥåɡ
H01L21/76897	мӥޤ³ץ饰ηʤ꥽Ū׳ΤʤʳޤΡų̥ȥ󥸥μ祷ꥵɲȣ̣ˡ
H01L21/76898	ȾƳδĤ̤Ʒ줿Ρ
H01L21/77	Ĥζ̴ޤϾ˷ʣθιʤޤϽѲϩʤ֤¤ޤϽ<br><br><u></u><br><br>ȣ̣ȣ̣ʬव뷿֤νˡϤΥ롼פӤΥ֥롼פˤʬवʤ֤ͭˡˤĤƤ֤Ȱʬव롥Ūų̵ѤѤ¿ʳϣȣ̣ޤ롨ģңͤ¿ʳϣȣ̣ޤ롨ӣңͤ¿ʳϣȣ̣ޤ롨ңϣͤ¿ʳϣȣ̣ޤ롨ţУңϣͤ¿ʳϣȣ̣ޤ
H01L21/78	ʣ̸Ĥ֤˴Ĥʬ䤹뤳ȤˤΡȾƳΤɽ̤ʪŪޤϷѤǣȣ̣
H01L21/7806	ǽưؤδĤʬΥޤΡ
H01L21/7813	кƻѲǽʴĤĤΡ㡥ԥեȥա
H01L22/00	¤ޤϽλޤ¬ꡨ¬ꡤʤʤ켫Τѹ뤿Τʤ빩ͭʤʤλΤι¤ʸΤޤϷ¬ޤϼ谷ȣ̣ȾƳ֤ŬѤޡȣ̣롼ףȣ̣ȣ̣ʬव֤ͭλˡޤϹ¤ϤΥ롼פ򻲾ȡŪʤѤĴޤʬϣǣΣġȾƳ֤ŵŪλǣңϥƥȣӣˡ
H01L22/10	¤ΰȤƤ¬ʥС󥤥ǣңˡ
H01L22/12	й¤Ūѥ᡼ΤΤΡ㡥Ψ١椬ߡ嶯١١Ū¤ˡŵŪ¬ꡤȻŪ¬ʳȻŵŪ¬ȣ̣ˡ
H01L22/14	ŵŪѥ᡼ΤΤΡ㡥̡͡ã֡ŵŪʤˤȻ
H01L22/20	ʣ¬ꡤޡ󥰤ޤϥʳʤȤΥ󥹡
H01L22/22	¬˱֤βʤޤϽʣʤ³ޤǡʥϥޤ¤¢ʤλȸ򴹣ǣãҥ塼켫Σȣ̣ˡ
H01L22/24	з٤ޤľܻ뤳ȤΤǤʤ֤θŪ㡥ŪŲϽСΤˢ͡ѲŰȥ饹ȣǣңˡ
H01L22/26	¤˸ʤʹ¬˱ư㡥Сݣ¬ʣã֤ͣǤνФμ££֣ȣʣˡ
H01L22/30	¤ޤϽλޤ¬ꡤޤϿ¬ΤäŬ礷¤
H01L22/32	֤ޤϴĤؤɲŪʥ꡼ɥ᥿饤㡥ɲŪʥѥåɤޤϥѥåʬ饤֥饤Υ饤󡤵ƳΡưθΤؤΤޤϤήƳ֣ȣ̣ˡ
H01L22/34	¤ŵŪħդޤϴƻ뤹뤿βϩ㡥ƥȥΡ¤줿ϡƥ˹Τ줿ܡɥǥХ˥ޤϤΤΥѥåɹ¤饤֥饤֡ʥå󥰡ޥץ쥭󥰡ƥ֣ǣң꥽եȼ桤㡥̴ǣƣŪʤˤֹ碌Τι¤ǣƣˡ
H01L23/00	ȾƳΤޤ¾θ֤κʣȣ̣ͥ表¤ޤϽλޤ¬ꡤޤϿ¬Ф빽¤ȣ̣ȾƳΤޤϸΤ³ޤϼ곰μʡޤϤ˴Ϣˡȣ̣楻󥵡ǣˣѡ<br><br><u></u><br><br>Υ롼פϰʲΤΤޤʤ<br>ȾƳΤκޤϥ롼ףȣ̣ʬव֤ŶˤκκϤΥ롼פޤ롨<br>ݥ롼ףȣ̣ȣ̣ΣĤΥᥤ󥰥롼פʬव֤ͭʺκϤΥ롼פޤ
H01L23/02	ƴߡʣȣ̣ȣ̣ȣ̣ȣ̣Уȣ̣Ѥͥ表ХѤΤΣǣáѡ
H01L23/04	ƴޤʡ㡥åסɡΡѷħΤ
H01L23/041	ƴ郎¤ǤꡤȾƳΤդ⤿ʤΡ
H01L23/043	ƴ郎¤ǤꡤȾƳѥ꡼ɤʤӤ˥ޥȤȤƳĤ
H01L23/045	¾Υ꡼ɤӤϩĤ
H01L23/047	¾Υ꡼ɤʿԤǤ
H01L23/049	¾Υ꡼ɤ˿ľǤ
H01L23/051	⤦ĤΥ꡼ɤʿԤʤĤǷΡ㡥ɥå
H01L23/053	ƴ郎¤ǤꡤȾƳΤդ路Фޤ蘆줿ѴĤ
H01L23/055	꡼ɤӤϩĤΡСʣȣ̣ͥˡ
H01L23/057	꡼ɤʿԤǤ
H01L23/06	ƴκޤϤŵħΤ
H01L23/08	ΤΤΡ㡥饹
H01L23/10	ʴ֡㡥ƴγȴȤδ֤ޤƴΥ꡼ɤɤȤδ֡ߤκޤħΤ
H01L23/12	ޥȡ㡥ʬΥǤʤ
H01L23/13	ħΤ
H01L23/14	ޤϤŵħΤΡСʰϩģȣˣˡ
H01L23/142	ؤĶ°ġ
H01L23/145	ͭġ㡥ץ饹å
H01L23/147	ȾƳġȾƳƳģȣ̣ˡ
H01L23/15	ߥåޤϥ饹ġСʣȣ̣ȣ̣ȣ̣ͥˡ
H01L23/16	ƴνŶޤࡤ㡥󥿥ʣȣ̣ȣ̣ͥ
H01L23/18	ʪŪޤϲŪޤϴǤħΤ뽼Ŷ<br><br><u></u><br><br>ȣ̣ϣȣ̣ȣ̣ͥ
H01L23/20	֤ư٤ǥΤ
H01L23/22	֤ư٤ǱξΤ
H01L23/24	֤ư٤ǸΤޤϥΤΡСʣȣ̣ͥˡ
H01L23/26	ޤ¾ʪȿޤϵۼޤΡ㡥å
H01L23/28	ȡ㡥ءʤ㡥ݸѤΤΡѡʣȣ̣ͥ表ޤ³Τأȣ̣ѡ
H01L23/29	ħΤΡ㡥úǡشͶΣȣ̣ˡ
H01L23/291	лʪޤⲽʪޤúʪ㡥ߥå饹
H01L23/293	ͭʪ㡥ץ饹å
H01L23/295	нŶʪޤΡʣȣ̣ͥˡ
H01L23/296	ͭݥꥳ󲽹ʪ
H01L23/298	ȾƳκ㡥եꥳ
H01L23/31	ФޤϷѤħΤ
H01L23/3107	֤̩Ĥ줿Ρ
H01L23/3114	֤åץѥå㡥ãӣСΤΡ
H01L23/3121	дĤȤΰΡ
H01L23/3128	дĤ³ѤεХפĤΡ
H01L23/3135	Х˽Ȥޤʤȡ
H01L23/3142	ʴ֤ߺࡤ㡥¥ʺޡ
H01L23/315	ȤƶͭΡ
H01L23/3157	ʬȤޤʤؤȤѤޥأȣ̣ˡ
H01L23/3164	ʤեǤΡ
H01L23/3171	ʤȾƳΤľŬѤΡ㡥ѥå١ءʣȣ̣ͥˡ
H01L23/3178	ȾƳ˺줿¤ʤޤϽŶ
H01L23/3185	ȾƳΤ¦ɤʤʤ
H01L23/3192	¿ʤ
H01L23/32	ưδ֤ٻٻΡʤʬΥǤʪʣȣ̣ͥ表ͥ㡥åȡѰ̣ȣҡϩȣˡ
H01L23/34	ѡǮޤϲ֡д֡Ǯ֣ȣ̣ˡ
H01L23/345	вǮ֡Ǯ֣ȣ̣ˡ
H01L23/36	ѤޤϲǮưפˤ뤿κޤ㡥ҡȥ󥯡Сʣȣ̣ȣ̣ȣ̣ȣ̣ȣ̣ͥ表Ǯȣ̣ˡ
H01L23/367	֤ηˤưפˤʤѡСʣȣ̣ȣ̣ȣ̣ȣ̣ȣ̣ͥˡ
H01L23/3672	Хեѥեޤϥҡȥ󥯡ʥ꡼ɥե졼ΰǤΣȣ̣ˡ
H01L23/3675	ƴηħΤΡ
H01L23/3677	Х磻ޤϥԥѥեޤϥҡȥ󥯡
H01L23/373	ѺˤưפˤʤѡФޤǮĥŬ뤿κ㡥úǡ
H01L23/3731	Хߥåޤϥ饹ʣȣ̣ȣ̣ȣ̣ȣ̣ȣ̣ͥˡ
H01L23/3732	Хɡ
H01L23/3733	ԶѼޤϰ¤ͭΡ㡥ʴΤޤݡ֡¿¤ʣȣ̣ȣ̣ͥˡ
H01L23/3735	ؤޤ¿ع¤㡥Ƽߥåľġ
H01L23/3736	ж°ʣȣ̣ȣ̣ȣ̣ȣ̣ȣ̣ͥˡ
H01L23/3737	ǮƳŶʪޤޤϴޤޤʤͭ
H01L23/3738	ȾƳκ
H01L23/38	ڥ̤Ѥ
H01L23/40	ʬΥǤѤޤϲǮ֤ΤμդޤϸʡСʲǮȣ̣ˡ໤ˤꡤץ饰ޤϥХ͡
H01L23/4006	ХܥȤޤϤͤͭΡ
H01L23/4012	¿ȾƳ֤ѤΤΡΩΤ켫Σȣ̣ˡ
H01L2023/4018	вǮޤѤ֤μħΤΡ
H01L2023/4025	Х١ǥ꡼֡㡥ץ쥹ѥåǥȥ󥸥
H01L2023/4031	Хѥå줿ǥ꡼֡㡥ĤޤǤΥϥ󥰡ɡ
H01L2023/4037	Хҡȥ󥯤μդǮϩޤϾħΤΡ
H01L2023/4043	Хåפͭҡȥ󥯡
H01L2023/405	ХѥåФҡȥ󥯡
H01L2023/4056	ɲåҡȥ󥯤Фҡȥ󥯡
H01L2023/4062	ХܡɤޤϥӥͥåȤФޤϷФƤΥҡȥ󥯡
H01L2023/4068	֤ȥҡȥ󥯴֤ǮƳΡ㡥ʥҡȥץåǮƳХɡ
H01L2023/4075	еŪǻҡ
H01L2023/4081	мǮƳ˵ǽʤʥǻҡ
H01L2023/4087	Хޥ°ʡ󥿡ݡפޤϥͥʡ
H01L23/4093	Хʥå֡㡥åס
H01L23/42	ǮޤѤưפˤ뤿ޤ󤵤줿ƴФޤȡѤνŶޤʡвǮȣ̣ѡѺħΤΣȣ̣
H01L23/427	֤Ѳˤѡ㡥ҡȥѥפλѡСʱղˤΣȣ̣ˡ
H01L23/4275	иΤͻޤϾȯˤΡ
H01L23/433	ηħΤƴΡࡤ㡥ԥȥ
H01L23/4332	Х٥
H01L23/4334	Ȥˤʣȣ̣ͥˡ
H01L23/4336	ХåȾͤȤȤ߹碌ˤΡ
H01L23/4338	Хԥȥ㡥Фͤα줿
H01L23/44	Τʳή˿ƤΡСʣȣ̣ͥˡ
H01L23/445	ήΤղǤΡ㡥㲹ƴˤΡ
H01L23/46	ήưήΤˤǮΰưˤΡʣȣ̣ȣ̣ͥ
H01L23/467	Ρ㡥ήȤˤΡСʣȣ̣ͥˡ
H01L23/473	ΤήȤˤΡСʣȣ̣ȣ̣ͥˡ
H01L23/4735	ХåȾ͡ʣȣ̣ͥˡ
H01L23/48	ưθΤޤϸΤήƳ֡㡥꡼ɡü֡ʰ̣ȣҡˡФΤκ<br><br><u></u><br><br>ȾƳΤޤ¾θΤ³ޤǤΤμʡޤϤ˴ϢˡǤäơ³֥롼פޤʤ֤ޤˡϣȣ̣ޤ
H01L23/481	꡼³㡥ӥ³̹¤
H01L23/482	ȾƳΤʬΥǤʤ褦ŬѤ줿ؤʤΡСŶˣȣ̣ˡ
H01L23/4821	жˤ֥å¤
H01L23/4822	Хӡ꡼ɡ
H01L23/4824	гĥ줿سԤĥѥåɡ㡥åɹ¤֥¤ե󥬡¤
H01L23/4825	ޤȾľȾƳؤʤ֡㡥ꥳ󥪥󥵥ե¤ʤӣϣӡΤΤΡ
H01L23/4827	к
H01L23/4828	Ƴͭޤϥڡȡ㡥Ƴޡ󥯡
H01L23/485	Ƴؤؤޤع¤ʤΡ㡥ʿСʣȣ̣ȣ̣ȣ̣ȣ̣ͥ表ȣ̣ܹХåɣȣ̣Хץͥȣ̣ˡ
H01L23/4855	ĥФ¤
H01L23/488	ϥդФޤϷѹ¤ʤΡСʥХץͥȣ̣ˡ
H01L23/49	˶Τ褦ʤΡ֤ΤޤϥԥޤʸեСѤΣȣ̣Ĥդ줿ԥȣ̣ˡ
H01L23/492	ޤġФޤϤΤΥϥ
H01L23/4922	ԶѼޤϰ¤ͭΡ
H01L23/4924	кħΤΡ
H01L23/4926	ȾƳκޤ
H01L23/4928	úǤޤ
H01L23/495	꡼ɥե졼Фޤ¾ʿó꡼ɡʣȣ̣ͥ表꡼ɥե졼ˤ빽ʴ֤³ȣ̣ˡ
H01L23/49503	ХѥåɤħΤΡ
H01L23/49506	ХѥåɤȤѤġ㡥ߥåץ饹åʣȣ̣ͥˡ
H01L23/4951	Хåץ꡼ɤޤϥ꡼ɥå׵ѡʤѥåɤȤƻȤ꡼ɥե󥬡
H01L23/49513	ХåפȥѥåɤȤδ֤˥ܥǥ󥰺ĤΡ
H01L23/49517	ɲå꡼ɡ
H01L23/4952	ɲå꡼ɤХפޤƳǤΡ
H01L23/49524	ɲå꡼ɤơץꥢޤʿó꡼ɤǤΡ
H01L23/49527	ɲå꡼ɤ¿ؤΤΡ
H01L23/49531	ɲå꡼ɤĤǤΡ
H01L23/49534	¿ؤǤΡ
H01L23/49537	аĤ֤˼դ줿ʣΥ꡼ɥե졼
H01L23/49541	Х꡼ɥե졼η
H01L23/49544	Х꡼ɥե졼ʿ̤ѷۼʬ㡥عʣȣ̣ͥˡ
H01L23/49548	̷ʣȣ̣ͥˡ
H01L23/49551	жʬħΤΡ
H01L23/49555	жʬ꡼ɤǤΡ
H01L23/49558	Х꡼ɥե졼ء㡥
H01L23/49562	Уȣ̣ʬव֤ΤΤΡ
H01L23/49565	Х꡼ɥե졼Υɥ졼롤㡥ץåȥۡĤΡ
H01L23/49568	Ǯ¥ʤäŬ礹Ρ
H01L23/49572	Хե७ꥢͭ뤢뤤ͭʤʶ°ơפʤΡʣȣ̣ȣ̣ӣȣ̣ȣ̣ͥˡ
H01L23/49575	Х꡼ɥե졼ȾƳ֤ΩΡ
H01L23/49579	Х꡼ɥե졼ޤϤξؤκħΤΡ
H01L23/49582	Х꡼ɥե졼ζ°ء
H01L23/49586	Х꡼ɥե졼ء
H01L23/49589	Х꡼ɥե졼ȰβޤϤξ˷줿ǥ󥵡
H01L23/49593	Х꡼ɥե졼Ȥ߹碌ӡ
H01L23/49596	Х꡼ɥե졼Ȥ߹碌ȯ
H01L23/498	ľΥ꡼ɡФʤ᥿饤ޤϥ꡼ɥե졼ѡ㡥åץꥢʴĤηȣ̣ˡ
H01L23/49805	Х꡼ɤĤ¦ɤޤˤߤ줿Ρ㡥ɽ̼ΤΥ꡼ɥ쥹ѥå
H01L23/49811	ľζ°ؤܹ礷ɲå꡼ɡ㡥ԥ󡤥ХסƳʿó꡼ɡʣȣ̣ͥˡ
H01L23/49816	г³ΤδľεХס㡥ܡ륰åɥ쥤Σ£ǣϡ
H01L23/49822	¿شġñشľ¿إ᥿饤ȣ̣ˡ
H01L23/49827	дĤ̤ƤΥӥ³㡥Ĥ̲ᤷƤΥԥƱ֥ʣȣ̣ȣ̣ȣ̣ȣ̣ͥˡ
H01L23/49833	ʣĤʤå׻ٻ¤ΤΡ
H01L23/49838	зޤϥ쥤ȡ
H01L23/49844	Уȣ̣ʬव֤ФΡ
H01L23/4985	Хե쥭֥ġʣȣ̣ӣȣ̣ͥˡ
H01L23/49855	ʿóɡ㡥쥸åȥɡѤΤΡʥɤ켫Σǣˣˡ
H01L23/49861	ľ˸ޤȤ줿꡼ɥե졼ʣȣ̣ȣ̣ͥˡ
H01L23/49866	кħΤΡʴĤκȣ̣꡼ɥե졼κȣ̣ˡ
H01L23/49872	ƳźȾƳκޤΡ
H01L23/49877	úǡ㡥ե顼ĶƳե顼ȣ̣ˡ
H01L23/49883	ƳźͭޤϥڡȤޤΡ㡥ϩѤΤΡʰϩѣȣˣˡ
H01L23/49888	ƳźĶƳޤΡ
H01L23/49894	ؤޤʤκ
H01L23/50	ѲϩѤΤΡ㡥ϥХ¿꡼ɡѡʣȣ̣ȣ̣ͥ
H01L23/52	ưΣĤιʤ¾ιʤήƳ֡Фʤ³㡥꡼ɥե졼ʸŪ³ǣ£ˡ
H01L23/522	ȾƳξʬΥǤʤ褦˷줿Ƴصڤؤ¿ع¤ʤ볰³ޤ
H01L23/5221	ХС³
H01L23/5222	ؤΡޤش֤֤ޤ̸̡¾֣ȣ̣ˡ
H01L23/5223	ؤȰβǥ󥵡
H01L23/5225	ؤȶ˷줿ء
H01L23/5226	¿³֤Υӥ³
H01L23/5227	ؤΡޤش֤ΡͶƳ֤ޤͶƳ̡¾ͶƳ֣ȣ̣ˡ
H01L23/5228	ؤΡޤش֤Ρ֤ޤ񹳸̡¾֣ȣ̣ˡ
H01L23/525	ŬѤǤ³ͭ
H01L23/5252	Хҥ塼ʤƳƳˤξ֤Ѥ³ޤΡ
H01L23/5254	гΥӡࡤ㡥졼ӡޤϥӡࡤλѤˤ֤Ѳ
H01L23/5256	Хҥ塼ʤƳƳˤξ֤Ѥ³ޤΡ
H01L23/5258	гΥӡࡤ㡥졼ӡޤϥӡࡤλѤˤ֤Ѳ
H01L23/528	³¤Ρзޤϡѥ쥤ȡСʣȣ̣ͥ表르ꥺǣƣˡ
H01L23/5283	̷
H01L23/5286	ŸޤϥХ
H01L23/532	ħΤ
H01L23/53204	Ƴź
H01L23/53209	ж°äȤΡ㡥⡤°ꥵɡʣȣ̣ͥˡ
H01L23/53214	мפʶ°ߥ˥ǤΡ
H01L23/53219	Хߥ˥
H01L23/53223	Хߥ˥ؤ˴Ϣɲء㡥塤ɡåء
H01L23/53228	мפʶ°ƼǤΡ
H01L23/53233	Ƽ
H01L23/53238	Ƽؤ˴Ϣɲء㡥塤ɡåء
H01L23/53242	мפʶ°°ǤΡ㡥
H01L23/53247	е°
H01L23/53252	е°ؤ˴Ϣɲء㡥塤ɡåء
H01L23/53257	мפʶ°ͻ°ǤΡ
H01L23/53261	йͻ°
H01L23/53266	йͻ°ؤ˴Ϣɲء㡥塤ɡåء
H01L23/53271	ȾƳκ㡥ݥꥷꥳ󡤤ޤΡ
H01L23/53276	úǡ㡥ե顼ࡤޤΡĶƳե顼ȣ̣ˡ
H01L23/5328	Ƴͭޤϥڡȡ㡥Ƴޡ󥯡ޤΡ
H01L23/53285	ĶƳޤΡ
H01L23/5329	
H01L23/53295	ء
H01L23/535	³ޤΡ㡥¤С꡼³ȣ̣ˡ
H01L23/538	Ĥξޤ˷ʣȾƳΥå״֤³¤ʡУȣˤͥ表¤ޤϽȣ̣ѡޥȤ켫Σȣ̣кȣ̣ѡ
H01L23/5381	ХС³㡥֥åƥåץС
H01L23/5382	ŬΤ³㡥ѹΤΤΡ
H01L23/5383	¿شġʣȣ̣ͥ表ñشľ¿ض°Σȣ̣ˡ
H01L23/5384	ХԥĤޤϻʤĤ̤Ƴӥ㡥ƱƳΡʣȣ̣ȣ̣ͥ表Ĥ˼դ줿ԥȣ̣ˡ
H01L23/5385	ʣĤΩΡ
H01L23/5386	³¤ηޤϥ쥤ȡ
H01L23/5387	нġʣȣ̣ͥˡ
H01L23/5388	ʿóʥɡ㡥쥸åȥɡѤΤΡʥɤ켫Σǣˣˡ
H01L23/5389	Хåפ³ӻٻ¤ˤŪ̩Ĥ줿Ρ
H01L23/544	ȾƳ֡ФޤʡѤŬѤɸ㡥ϿɸХ饤ȹ¤ϥޥåס¤ħդޤϴƻ뤹뤿Υƥȥѥȣ̣ˡ<br><br><u></u><br><br>ȣ̣ʬव硤κϣȣ̣ӥ֥롼פ򤵤줿ǥ󥰥ɤѤƤ˥ǥå
H01L23/552	͡㡥Фޤżȡѡݸ
H01L23/556	եݸ
H01L23/562	еŪ»Фݸʣȣ̣ȣ̣ͥˡ
H01L23/564	¾ʬսʬवʤ㡥Фݸʥåȣ̣ˡ
H01L23/57	иС󥸥˥󥰤ޤѹݸ
H01L23/573	мưŪʼʤѤΡ
H01L23/576	ǽưϩѤΡ
H01L23/58	¾ʬवʤȾƳѹ¤ŪŵŪ֡С㡥ӤȤȤ߹碌ˤΡʣȣ̣ȣ̣ͥˡ
H01L23/585	ƳؤޤĤޤҤޤޤϴĤʤΡʣȣ̣ȣ̣ȣ̣ȣ̣ͥˡ
H01L23/60	Ų٤ޤŤݸ㡥եǡɡʰ̣ȣơ
H01L23/62	Űݸ㡥ҥ塼ʬϩ
H01L23/64	ԡ
H01L23/642	֡ʣȣ̣ȣ̣ȣ̣ȣ̣ͥ表ȾƳξش̸֤̣ȣ̣ˡ
H01L23/645	ͶƳ֡ʣȣ̣ȣ̣ͥˡ
H01L23/647	֡ʣȣ̣ȣ̣ͥˡ
H01L23/66	Ŭ<br><br><u></u><br><br>ȣ̣ʬव硤κϣȣ̣ӥ֥롼פ򤵤줿ǥ󥰥ɤѤƤ˥ǥå
H01L24/00	ȾƳΤޤϸΤ³ޤϼ곰μʡ˴Ϣˡޤ֡<br><br><u></u><br><br>Υ롼פϰʲΤΤޤʤ<br>ȾƳΤޤ֤ŶˤκǤäƥ롼ףȣ̣ޤΡ<br>֤ͭκǤäƣȣ̣ȣ̣ΣΥᥤ󥰥롼פʬवΡ<br>ȣˣȣˣޤϩ<br>ȣˣȣˣޤϩΤ֤ޤ¤ˡ<br>ȣ̣ȣȣ̣ȣ̣Υ֥롼פޤʤ¤ޤϽ<br>롼ףȣ̣ȣ̣ޤȾƳ֤ȤΩơ<br>ȣ̣ӤΥ֥롼פޤ̸Ĥιʴ֤ήήѤ³Ŭѡ<br>ȣ̣ȣ̣ޤƴޤߡ<br>ȣ̣ȣ̣ӥ֥롼פޤޥȡ<br>ȣ̣ȣ̣ޤѡǮޤϲ֡<br>ȣ̣ȣ̣ӣȣ̣ȣ̣ޤήƳ֡<br>ȣ̣ȣ̣ޤ빽¤ŪŵŪ֡<br>ȣ̣ȣ̣ޤȾƳΤޤ¾θ֤Ω<br>Υ롼פǤϼΥǥ󥰥ɤȤ롧ȣ̣ȣ̣ȣ̣ӤΥ֥롼
H01L24/01	³뤿ɽ̤˼դޤϷ뤿Υܥǥ󥰼ʡ㡥åץġѥåå٥룱³˴Ϣ¤ˡ
H01L24/02	Хܥǥ󥰲սľΡ㡥åץꥢȣ̣ȣ̣ȣ̣ˡ˴Ϣ¤ˡ<br><br><u>ٹ</u><br><br>롼ףȣ̣ݣȣ̣ϥ롼ףȣ̣ӣȣ̣ʸκʬब̤Ǥ롥<br>롼ףȣ̣ݣȣ̣ӣȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L24/03	¤ˡ
H01L24/04	³ˤܥǥ󥰲սι¤ޤ֡
H01L24/05	УĤΥܥǥ󥰲սΤΡ
H01L24/06	ʣΥܥǥ󥰲սΤΡ
H01L24/07	³ˤܥǥ󥰲սι¤ޤ֡
H01L24/08	УĤΥܥǥ󥰲սΤΡ
H01L24/09	ʣΥܥǥ󥰲սΤΡ
H01L24/10	ХХץͥľΥХס㡥åץꥢȣ̣ˡ˴Ϣ¤ˡ
H01L24/11	¤ˡľΥХפΤΤΣȣ̣ˡ
H01L24/12	³ˤХץͥι¤ޤ֡
H01L24/13	УĤΥХץͥΤΡ
H01L24/14	ʣΥХץͥΤΡ
H01L24/15	³ˤХץͥι¤ޤ֡
H01L24/16	УĤΥХץͥΤΡ
H01L24/17	ʣΥХץͥΤΡ
H01L24/18	й̩³Σȣģɡϥͥ˴Ϣ¤ˡʣȾƳΥå״֤³¤ȣ̣ˡѡ<br><br><u>ٹ</u><br><br>롼ףȣ̣ݣȣ̣ϥ롼ףȣ̣ӣȣ̣ʸκʬब̤Ǥ롥<br>롼ףȣ̣ݣȣ̣ӣȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L24/19	й̩³Ŷˤ¤ˡ
H01L24/20	й̩³Ŷˤι¤ޤ֡
H01L24/23	³ˤ̩³Ŷˤι¤ޤ֡
H01L24/24	УĤι̩³ͥΤΡ
H01L24/25	ʣι̩³ͥΤΡ
H01L24/26	Х쥤䡼ͥ㡥ץ졼ȥͥϤޤǴ쥤䡼˴Ϣ¤ˡ
H01L24/27	¤ˡ
H01L24/28	³ˤ쥤䡼ͥι¤ޤ֡
H01L24/29	УĤΥ쥤䡼ͥΤΡ
H01L24/30	ʣΥ쥤䡼ͥΤΡ
H01L24/31	³ˤ쥤䡼ͥι¤ޤ֡
H01L24/32	УĤΥ쥤䡼ͥΤΡ
H01L24/33	ʣΥ쥤䡼ͥΤΡ
H01L24/34	Хȥåץͥ㡥֤Ϥ뤿Ƽȥåס˴Ϣ¤ˡ<br><br><u>ٹ</u><br><br>롼ףȣ̣ݣȣ̣ϥ롼ףȣ̣ȣ̣ȣ̣ӣȣ̣ʸκʬब̤Ǥ롥<br>롼ףȣ̣ݣȣ̣ӣȣ̣ȣ̣ȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L24/35	¤ˡ
H01L24/36	³ˤ륹ȥåץͥι¤ޤ֡
H01L24/37	УĤΥȥåץͥΤΡ
H01L24/38	ʣΥȥåץͥΤΡ
H01L24/39	³ˤ륹ȥåץͥι¤ޤ֡
H01L24/40	УĤΥȥåץͥΤΡ
H01L24/41	ʣΥȥåץͥΤΡ
H01L24/42	Х磻䡼ͥ˴Ϣ¤ˡ
H01L24/43	¤ˡѡ<br><br><u>ٹ</u><br><br>롼ףȣ̣ϥ롼ףȣ̣ӣȣ̣ȣ̣ʸκʬब̤Ǥ롥<br>롼ףȣ̣ӣȣ̣ȣ̣ȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L24/44	³ˤ磻䡼ͥι¤ޤ֡ѡ<br><br><u>ٹ</u><br><br>롼ףȣ̣ϥ롼ףȣ̣ӣȣ̣ʸκʬब̤Ǥ롥<br>롼ףȣ̣ӣȣ̣ȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L24/45	УĤΥ磻䡼ͥΤΡ
H01L24/46	ʣΥ磻䡼ͥΤΡ
H01L24/47	³ˤ磻䡼ͥι¤ޤ֡<br><br><u>ٹ</u><br><br>롼ףȣ̣ϥ롼ףȣ̣ӣȣ̣ʸκʬब̤Ǥ롥<br>롼ףȣ̣ӣȣ̣ȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L24/48	УĤΥ磻䡼ͥΤΡ
H01L24/49	ʣΥ磻䡼ͥΤΡ
H01L24/50	Хơ׼ưܥǥ󥰡Σԣ¡ϥͥʤե७ꥢ˴Ϣ¤ˡե쥭֥ʶ°ơפǥե७ꥢΤޤϤʤΣȣ̣Ūģȣ̣ȣ̣ˡѡ<br><br><u>ٹ</u><br><br>롼ףȣ̣ϥ롼ףȣ̣ʸκʬब̤Ǥ롥<br>롼ףȣ̣ӣȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L24/63	Х롼ףȣ̣ȣ̣ӤΥ֥롼פΤɤˤʬवʤͥ˴Ϣ¤ˡ
H01L24/64	¤ˡ
H01L24/65	³ˤ륳ͥι¤ޤ֡
H01L24/66	УĤΥͥΤΡ
H01L24/67	ʣΥͥΤΡ
H01L24/68	³ˤ륳ͥι¤ޤ֡
H01L24/69	УĤΥͥΤΡ
H01L24/70	ʣΥͥΤΡ
H01L24/71	³ɽ̤˼դޤϷʤܥǥ󥰼ʡư˴ΤٻٻΣȣ̣ˡ
H01L24/72	֤³뵡Ū°ʤʤæǽ³ʡ㡥ХͤޤϥåפѤ³
H01L24/73	Уȣ̣ȣ̣ȣ̣ȣ̣ȣ̣ȣ̣ȣ̣ȣ̣ΣʾΥ롼פʬवۤʤफʤܥǥ󥰼ʡ
H01L24/74	ȾƳΤޤϸΤ³ޤϼ곰ʤ¤뤿֡
H01L24/741	Хܥǥ󥰼ʡ㡥ͥ¤뤿֡
H01L24/742	ХХץͥ¤뤿֡
H01L24/743	Х쥤䡼ͥ¤뤿֡
H01L24/744	Хȥåץͥ¤뤿֡
H01L24/745	Х磻䡼ͥ¤뤿֡
H01L24/75	ХХץͥޤϥ쥤䡼ͥ³뤿֡
H01L24/76	Хӥɥåץ󥿡ͥȤ³뤿֡
H01L24/77	Хȥåץͥ³뤿֡
H01L24/78	Х磻䡼ͥ³뤿֡
H01L24/79	Хơ׼ưܥǥ󥰡Σԣ¡ϤΤ֡
H01L24/799	м곰֡
H01L24/80	³ɽ̤˼դޤϷƥܥǥ󥰼ʤѤȾƳΤޤ¾θΤ³ʡ
H01L24/81	ХХץͥѤΡ
H01L24/82	Хåץ٥ǥӥɥåץ󥿡ͥȤ뤳ȤˤΡ㡥̩٥󥿡ͥȡΣȣģɡϤΤʣȾƳΥå״֤³¤ȣ̣ˡ
H01L24/83	Х쥤䡼ͥѤΡ
H01L24/84	ХȥåץͥѤΡ<br><br><u>ٹ</u><br><br>롼ףȣ̣ϥ롼ףȣ̣ʸκʬब̤Ǥ롥<br>롼ףȣ̣ӣȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L24/85	Х磻䡼ͥѤΡʥ磻䡼ܥǥ󥰰̣£ˣˡ
H01L24/86	Хơ׼ưܥǥ󥰡Σԣ¡ϤѤΡ
H01L24/89	Х롼ףȣ̣ȣ̣ʬवʤͥ򾯤ʤȤ⣱ѤΡ
H01L24/90	³ʪΤɽ̤˼դޤϷʤǥܥǥ󥰤ʤѤȾƳΤޤϸΤ³ˡ㡥ХͤޤϥåפѤ³
H01L24/91	Уȣ̣ȣ̣ΣʾΥ롼פʬवۤʤˡޤȾƳΤޤϸΤ³ˡ
H01L24/92	йʳν
H01L24/93	ХХå<br><br><u>ٹ</u><br><br>롼ףȣ̣ϥ롼ףȣ̣ݣȣ̣ʸκʬब̤Ǥ롥<br>롼ףȣ̣ӣȣ̣ݣȣ̣ץ꡼ȥ򤹤뤿˹θ٤Ǥ롥
H01L24/94	Хϥ٥ΤΡʤҲƤʤʣ֤ʤ륦ϤФ³¹ԤΡ
H01L24/95	Хåץ٥ΤΡʤʣθҲ줿֡ʤ줿åסФ³¹ԤΡ
H01L24/96	֤ء㡥Ϥޤϵϡǥץ벽ƤΡؤ³˸ġΩΤڤΥ
H01L24/97	̴֤ġ㡥󥿡ݡ³ƤΡ̴Ĥ³˸ġΩΤڤΥ
H01L24/98	ȾƳΤޤϸΤ곰ˡ
H01L25/00	ʣθġȾƳΤޤ¾θ֤ʤΩΡС¿ʳѡʡȾƳ֤ΩΤΥ꡼ɥե졼ȣ̣֥롼ףȣ̣ȣ̣ΣĤʬवʤޤ֤ѤȾƳ֤ȤΩơ㡥ƴδФ륭åפ̩ȣ̣ѣĤζ̴ĤޤϾ˷줿ʣθιʤʤ֣ȣ̣ťθť⥸塼ޤϥ쥤ȣ̣Сȣǣѡ
H01L25/03	٤Ƥ֤롼ףȣ̣ȣ̣Ʊ֥롼פʬव뷿ʤΡ㡥ήɤΩ
H01L25/04	̤ƴʤ
H01L25/041	֤롼ףȣ̣ʬव줿ʤΡ
H01L25/042	֤ߤܤ֤Ρӣȣ̣ˡ
H01L25/043	֤Ѥ߽Ť֡
H01L25/065	֤롼ףȣ̣ʬव줿ʤ<br><br><u></u><br><br>롼ףȣ̣롼ףȣ̣ӥ롼ףȣ̣ͥ
H01L25/0652	֤ܤƳơξ֤ΡʤΩΡ
H01L25/0655	֤ߤܤ֤Ρ
H01L25/0657	֤Ѥ߽Ť֡
H01L25/07	֤롼ףȣ̣ʬव줿ʤ<br><br><u></u><br><br>롼ףȣ̣롼ףȣ̣ȣ̣Фͥ
H01L25/071	֤ܤƳơξ֤ΡʤΩΡ
H01L25/072	֤ߤܤ֤Ρ
H01L25/073	й֤Ǥäƹ̲᤹룱ʾξ˥ޥȤ줿Ρ
H01L25/074	йʤ֤Ѥ߽Ť֡
H01L25/075	֤롼ףȣ̣ʬव줿ʤ
H01L25/0753	֤ߤܤ֤Ρ
H01L25/0756	֤Ѥ߽Ť֡
H01L25/10	̤ƴ
H01L25/105	֤롼ףȣ̣ʬव줿ʤΡ<br><br><u></u><br><br>ΩΤκȣ̣ʬव硤κϣȣ̣ӥ֥롼פ򤵤줿ǥ󥰥ɤѤƤ˥ǥå
H01L25/11	֤롼ףȣ̣ʬव줿ʤ<br><br><u></u><br><br>롼ףȣ̣롼ףȣ̣ӣȣ̣ͥ
H01L25/112	кΩΡ
H01L25/115	֤ߤܤ֤Ρ
H01L25/117	֤Ѥ߽Ť֡
H01L25/13	֤롼ףȣ̣ʬव줿ʤ
H01L25/16	֤ȣ̣ȣ̣Фӣȣ̣ѤΣİʾΰۤʤᥤ󥰥롼פʬव뷿ʤΡ㡥ϥ֥åɲϩηСʥϥ֥åɲϩѤ³ȣ̣ˡ
H01L25/162	֤ʾΰۤʤľ˥ޥȤΡ
H01L25/165	ƴ
H01L25/167	иŻ֡㡥̣ţġեȥɡʤΡ
H01L25/18	֤롼ףȣ̣ȣ̣Ʊᥤ󥰥롼פΣİʾΰۤʤ륵֥롼פʬव뷿ʤΡСʣȣ̣ӤΥ֥롼פʬव֤ʤΤϣȣ̣ȤΥ֥롼פ򻲾ȡˡ
H01L25/50	ʣ֤ʤΩΤ¿ʳ֤ϥ롼ףȣ̣ޤϣȣ̣ʬव줿ʤΡʣȣ̣ͥˡ
H01L2221/00	ȣ̣ޤȾƳ֤ޤϸ֤ޤϤʤ¤ޤϽŬѤˡޤ
H01L2221/10	̸Ĥιʴ֤ήήѤ³Ŭ
H01L2221/1005	ͶΤηӸ
H01L2221/101	ͶΤؤγη
H01L2221/1015	ǥ奢ޥ¤ΤΤ
H01L2221/1021	쥸ؤؤΥǥ奢ޥ¤ͽ
H01L2221/1026	ӥͶΤؤεԥ顼ߤӥԥ顼νˤ
H01L2221/1031	ȥ٥ͶΤϽФΩĥӥ٥ͶΤؤΥӥˤǥ奢ޥ
H01L2221/1036	ۤʤӥ٥뤪ӥȥ٥ͶΤͭǥ奢ޥ
H01L2221/1042	ޤͶ
H01L2221/1047	䤬Ͷιˤ
H01L2221/1052	ǽͶؤη
H01L2221/1057	ӥۡޤϥȥǤΤ
H01L2221/1063	ͶΤؤγεޤϰ켡ŪͶ
H01L2221/1068	ƳΤηӸ
H01L2221/1073	ءؤޤϥ饤
H01L2221/1078	ͶΤؤγˤϷʤ¿
H01L2221/1084	ʤؤγ¥ʤޤϲǽˤ뤿äѤءʤ
H01L2221/1089	ؤѤ߽Ť
H01L2221/1094	ʥΥ塼֤ޤϥʥΥ磻䤫ʤƳŹ¤
H01L2221/67	¤ޤϽȾƳΤޤŵŪ֤谷֡ȾƳΤޤŵŪ֤⤷Ϲʤ¤ޤϽΥϤ谷֡¾ʬսΤʬवʤ
H01L2221/683	ٻޤĻΤΤ
H01L2221/68304	ٻŪ˻Ѥ
H01L2221/68309	ֹ碌ޤٻ
H01L2221/68313	¤ޤϥޥδ֡㡥ɣåѥåޤȾ֡㡥Ǽ뤿ζƶޤٻ
H01L2221/68318	ٻ֤ޤϥϤʬΥưפˤʤޤٻ
H01L2221/68322	ٻʣ֤ΰŪʬΥưפˤʤޤٻ
H01L2221/68327	󥰤ޤϸ˻Ѥ
H01L2221/68331	ưŪࡤ㡥մġΤ
H01L2221/68336	󥰸ٻγĥޤ
H01L2221/6834	֤ޤϥϤǽư¦ݸ뤿˻Ѥ
H01L2221/68345	ʻٻĤ¤λٻΤȤƻѤ
H01L2221/6835	ǽưǻҤΥӥɥå¤λٻΤȤƻѤ
H01L2221/68354	ޥȤΩĥ줿åפٻ뤿˻Ѥ
H01L2221/68359	³ѥǥޤϥӥɥåؤ¤λٻΤȤƻѤ
H01L2221/68363	֤ΥϥɥĤѤʤδĤ饿åȴĤؤľž̤ޤžˡˤƻѤ
H01L2221/68368	ʤƤ⣲Ĥž̹ʤ֤ΥϥɥĤޤΡޤžˡˤƻѤ
H01L2221/68372	ŵ³֤ޤϥϤٻ뤿˻ѤΡʥܥǥ󥰥ѥåɷȣ̣Хץͥȣ̣쥤䡼ͥȣ̣
H01L2221/68377	˻Ĥٻʤͭ
H01L2221/68381	֤ޤϥϤٻʬΥ뤿Ѥ벽ŪޤʪŪˡκ
H01L2221/68386	ΥˤʬΥ
H01L2221/6839	ΥѤΤӤޤϥʥդޤѤ
H01L2221/68395	ΥѤΥۥѤ
H01L2223/00	ȣ̣롼פޤȾƳΤޤ¾θ֤˴Ϣ
H01L2223/544	ȾƳ֤ޤʤŬѤɸ
H01L2223/54406	ѿ󤫤ʤ
H01L2223/54413	ǥ㡥Сɡǡޥȥåʤ
H01L2223/5442	ǥ롤ѿ㡥桤ʤ
H01L2223/54426	饤ȤΤΤ
H01L2223/54433	̤ޤ׾ޤ
H01L2223/5444	ŵŪɤ߼ΤΤ
H01L2223/54446	̵ŵŪɤ߼
H01L2223/54453	Ѥ뤿Τ
H01L2223/5446	饤֥饤֤
H01L2223/54466	ߡޤϥե󥹥֤
H01L2223/54473	󥰸Ѥ뤿Τ
H01L2223/5448	Υå׾֤졤ӥ󥰸Υå׾˻Ĥ
H01L2223/54486	ѥåʾ֤Ρ㡥ȡ꡼ɡѥå
H01L2223/54493	Ͼμɸ㡥ꥨơեåȡΥååȥʥС
H01L2223/58	¾ʬवʤȾƳѹ¤ŪŵŪ
H01L2223/64	ԡ
H01L2223/66	Ŭ
H01L2223/6605	ŵŪ³
H01L2223/6611	磻䡼³
H01L2223/6616	ķ³㡥ӥ
H01L2223/6622	ǽưޤϼưƱեɥ롼
H01L2223/6627	Ƴȴɡ㡥ޥȥåץ饤󡤥ȥåץ饤󡤥ץʡϩ
H01L2223/6633	ۤʤƳȴɤȤδ֤Ѵ
H01L2223/6638	ư
H01L2223/6644	Υѥåδ綠켫Σȣơ
H01L2223/665	Х
H01L2223/6655	֡㡥ͶƳʤ
H01L2223/6661	ư֤ΤΤΡʼưʤ켫Σȣ̣)
H01L2223/6666	ڤΥΤΡ㡥Хѥǥ󥵡
H01L2223/6672	Ѳ줿ưʡ㡥ưʤΤߤȾƳ֡ΤΤΡʼưʤΤߤĽѲϩ켫Σȣ̣
H01L2223/6677	ƥʡ㡥ȾƳ֤ƴ˴ޤޤ륢ƥʡΤΤΡʥƥʤ켫Σȣ)
H01L2223/6683	ΥꥷåޥȽѲϩΣͣͣɣáϤΤΤ
H01L2223/6688	ȿŬѡʤۤʤȿư뤿Τ
H01L2223/6694	ȾƳƴ˴ޤޤŪ楤󥿡ե
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H01L2225/03	롼ףȣ̣ȣ̣Ʊ֥롼פʬव뷿ʤ뤹٤Ƥ
H01L2225/04	̤ƴʤ
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H01L2225/06503	Ѥ߽Ť
H01L2225/06506	ִ֤Υ磻ޤϥ磻ŵ³
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H01L2225/06531	󥬥Х˥å硤㡥̷
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H01L2225/06544	ӥ³Ѥ߷θ㡥ޤϥ쥤
H01L2225/06548	ġƴޤȤ̤Ƴӥ³
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H01L2225/06555	Ѥ߽Ťͤη㡥֤ηѤ߽Ťͤưפˤ
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H01L2225/06562	Ѥ߽ŤͤˤƾʤȤĤ֤žޤϥեåȤƤ
H01L2225/06565	֤Ʊ礭ͭġִ֤ꥢʤ
H01L2225/06568	֤礭̾Ρ㡥ԥߥåɾѤ߽Ť
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H01L2225/06586	ΥХ֤ޤϥХ׾Υͥͭϥ
H01L2225/06589	Ǯ㡥
H01L2225/06593	־ؤιŪΥޥȡֹ碌֡ʰŪʻٻλѣȣ̡
H01L2225/06596	Τι¤¤ޤϽλޤ¬ȣ̣ŵŪλޤŵŪξ֤ǣң
H01L2225/10	̤ƴ
H01L2225/1005	֤롼ףȣ̣ʬव줿ʤ
H01L2225/1011	ƴ郎Ѥ߽Ťˤ
H01L2225/1017	ǲƴ郎֤λٻΤʤ
H01L2225/1023	ٻΤĤΤ
H01L2225/1029	ٻΤ꡼ɥե졼Τ
H01L2225/1035	֤ٻΤ˴̩ĤΡ㡥̩³Σȣģɡ
H01L2225/1041	ǲƴξ³Τ̤Ŭѡ㡥ءط󥿡ݡ
H01L2225/1047	ƴ֤ŵ³κ
H01L2225/1052	磻ޤϥ磻ŵ³
H01L2225/1058	ХפޤϥХ׾ŵ³㡤ܡ롤ԥ顼ݥ
H01L2225/1064	İʾƴ¦̤ߤŵ³
H01L2225/107	ŵ³㡥󥿡ݡݡե쥭֥Ĥ𤷤Ρԣ¤ѤΡʰϩȣˣ
H01L2225/1076	ƴη
H01L2225/1082	ƴ֤ΰֹ碌θΤΤΡ㡥ߺεǽ
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